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@InProceedings{OliveiraUeMoHoReAb:2007:NoPrPl,
               author = "Oliveira, Rog{\'e}rio de Moraes and Ueda, M{\'a}rio and Moreno, 
                         Beatriz and Hoshida, Lilian and Reuther, Helfried and Abramof, 
                         Eduardo",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto 
                         Nacional de Pesquisas Espaciais (INPE)}",
                title = "A novel process for plasma immersion implantation and deposition 
                         with ions from vaporization of solid targets",
            booktitle = "Proceedings...",
                 year = "2007",
         organization = "International Workshop Plasma-Bases Ion Implantation and 
                         Deposition, 9. (PBII).",
  conference-location = "Leipzig, Germany",
      conference-year = "02-06 Sept.",
             language = "en",
        urlaccessdate = "18 jan. 2021"
}


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