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Tipo da ReferênciaConference Proceedings
Identificador8JMKD3MGP8W/364TSGE
Repositóriosid.inpe.br/mtc-m18@80/2009/09.22.12.56
Metadadossid.inpe.br/mtc-m18@80/2009/09.22.12.56.56
Sitemtc-m16c.sid.inpe.br
Chave SecundáriaINPE--PRE/
Código do Detentorisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Chave de CitaçãoOliveiraGonUedRosRiz:2009:HiPlIm
Autor1 Oliveira, Rogério de Moraes
2 Gonçalves, José Américo Neves
3 Ueda, Màrio
4 Rossi, José Osvaldo
5 Rizzo, P. N.
Grupo1 LAP-CTE-INPE-MCT-BR
2 LAP-CTE-INPE-MCT-BR
3 LAP-CTE-INPE-MCT-BR
4 LAP-CTE-INPE-MCT-BR
5 LAP-CTE-INPE-MCT-BR
Afiliação1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Nacional de Pesquisas Espaciais (INPE)
3 Instituto Nacional de Pesquisas Espaciais (INPE)
4 Instituto Nacional de Pesquisas Espaciais (INPE)
5 Instituto Nacional de Pesquisas Espaciais (INPE)
TítuloHigh-temperature plasma immersion ion implantation into metallic substrates
Nome do EventoInternational Workshop on Plasma-Based Ion Implantation and Deposition, 10 (PPI&D).
Ano2009
Data7-11 Sept.
Localização do EventoSão José dos Campos, SP
ResumoThe temperature of the substrate has strong influence on the diffusion coefficient of nitrogen ions during PIII performed in metallic surfaces, which affect the ion implantation profiles and can lead to the formation of thick implanted layers. In order to heat conveniently a large spectrum of metals and metallic alloys in vacuum and in the presence of plasma, as mandatory for efficient PIII, it is necessary to count on a stable heat source, able to reach steady temperatures in the range of 400oC to more than 1000 oC. This has been accomplished in the current experiment by means of a thermionic cathode composed of a rolled tantalum foil covered with (Ba,Sr,Ca)O. Work function of this electron source is around 1.2 eV, which is much lower than 4.5 eV of typically used tungsten filament. Metallic samples, in this case, are the anode of the discharge itself, being polarized during the heating cycle by positive DC voltages about 500V. They are implanted with negative pulses of 10 kV/300Hz/40ìs. Comparison among metallic layers treated under distinct temperature values will be accomplished by evaluating their corrosion resistance and tribological properties. Samples will also be analyzed by X-ray diffraction, SEM and XPS.
Tipo SecundárioPRE CI
Tipo TerciárioPoster
AreaFISPLASMA
Última Atualização dos Metadados2020:04.28.17.49.06 sid.inpe.br/mtc-m18@80/2008/03.17.15.17 administrator {D 2009}
Estágio do Documentoconcluido
Espelhosid.inpe.br/mtc-m18@80/2008/03.17.15.17.24
e-Mail (login)simone
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Acervo Hospedeirosid.inpe.br/mtc-m18@80/2008/03.17.15.17
Tipo do ConteudoExternal Contribution
Permissão de Leituraallow from all
Unidades Imediatamente Superiores8JMKD3MGPCW/3ET2RFS
Conteúdo da Pasta sourcenão têm arquivos
Conteúdo da Pasta agreementnão têm arquivos
Histórico2009-09-22 12:56:56 :: simone -> administrator ::
2020-04-28 17:49:06 :: administrator -> simone :: 2009
Campos Vaziosaccessionnumber archivingpolicy archivist booktitle callnumber copyholder copyright creatorhistory descriptionlevel dissemination documentstage doi e-mailaddress edition editor electronicmailaddress format isbn issn keywords label language lineage mark nextedition notes numberoffiles numberofvolumes orcid organization pages parameterlist parentrepositories previousedition previouslowerunit progress project publisher publisheraddress readergroup resumeid rightsholder secondarydate secondarymark serieseditor session shorttitle size sponsor subject targetfile tertiarymark type url versiontype volume
Data de Acesso23 out. 2020
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