<?xml version="1.0" encoding="ISO-8859-1"?>
<metadatalist>
	<metadata ReferenceType="Conference Proceedings">
		<identifier>8JMKD3MGP8W/364TSGE</identifier>
		<repository>sid.inpe.br/mtc-m18@80/2009/09.22.12.56</repository>
		<metadatarepository>sid.inpe.br/mtc-m18@80/2009/09.22.12.56.56</metadatarepository>
		<site>mtc-m16c.sid.inpe.br 804</site>
		<secondarykey>INPE--PRE/</secondarykey>
		<holdercode>{isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S}</holdercode>
		<citationkey>OliveiraGonUedRosRiz:2009:HiPlIm</citationkey>
		<author>Oliveira, Rogério de Moraes,</author>
		<author>Gonçalves, José Américo Neves,</author>
		<author>Ueda, Màrio,</author>
		<author>Rossi, José Osvaldo,</author>
		<author>Rizzo, P. N.,</author>
		<group>LAP-CTE-INPE-MCT-BR</group>
		<group>LAP-CTE-INPE-MCT-BR</group>
		<group>LAP-CTE-INPE-MCT-BR</group>
		<group>LAP-CTE-INPE-MCT-BR</group>
		<group>LAP-CTE-INPE-MCT-BR</group>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<title>High-temperature plasma immersion ion implantation into metallic substrates</title>
		<conferencename>International Workshop on Plasma-Based Ion Implantation and Deposition, 10 (PPI&D).</conferencename>
		<year>2009</year>
		<date>7-11 Sept.</date>
		<conferencelocation>São José dos Campos, SP</conferencelocation>
		<abstract>The temperature of the substrate has strong influence on the diffusion coefficient of nitrogen ions during PIII performed in metallic surfaces, which affect the ion implantation profiles and can lead to the formation of thick implanted layers. In order to heat conveniently a large spectrum of metals and metallic alloys in vacuum and in the presence of plasma, as mandatory for efficient PIII, it is necessary to count on a stable heat source, able to reach steady temperatures in the range of 400oC to more than 1000 oC. This has been accomplished in the current experiment by means of a thermionic cathode composed of a rolled tantalum foil covered with (Ba,Sr,Ca)O. Work function of this electron source is around 1.2 eV, which is much lower than 4.5 eV of typically used tungsten filament. Metallic samples, in this case, are the anode of the discharge itself, being polarized during the heating cycle by positive DC voltages about 500V. They are implanted with negative pulses of 10 kV/300Hz/40ìs. Comparison among metallic layers treated under distinct temperature values will be accomplished by evaluating their corrosion resistance and tribological properties. Samples will also be analyzed by X-ray diffraction, SEM and XPS.</abstract>
		<secondarytype>PRE CI</secondarytype>
		<tertiarytype>Poster</tertiarytype>
		<area>FISPLASMA</area>
		<lastupdate>1970:01.01.00.00.00 sid.inpe.br/mtc-m18@80/2008/03.17.15.17 administrator</lastupdate>
		<metadatalastupdate>2020:04.28.17.49.06 sid.inpe.br/mtc-m18@80/2008/03.17.15.17 administrator {D 2009}</metadatalastupdate>
		<mirrorrepository>sid.inpe.br/mtc-m18@80/2008/03.17.15.17.24</mirrorrepository>
		<username>simone</username>
		<usergroup>simone administrator</usergroup>
		<visibility>shown</visibility>
		<transferableflag>1</transferableflag>
		<hostcollection>sid.inpe.br/mtc-m18@80/2008/03.17.15.17</hostcollection>
		<contenttype>External Contribution</contenttype>
		<readpermission>allow from all</readpermission>
		<nexthigherunit>8JMKD3MGPCW/3ET2RFS</nexthigherunit>
		<lasthostcollection>sid.inpe.br/mtc-m18@80/2008/03.17.15.17</lasthostcollection>
	</metadata>
</metadatalist>