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@InProceedings{OliveiraGonUedRosRiz:2009:HiPlIm,
               author = "Oliveira, Rog{\'e}rio de Moraes and Gon{\c{c}}alves, Jos{\'e} 
                         Am{\'e}rico Neves and Ueda, M{\`a}rio and Rossi, Jos{\'e} 
                         Osvaldo and Rizzo, P. N.",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto 
                         Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de 
                         Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas 
                         Espaciais (INPE)} and {Instituto Nacional de Pesquisas Espaciais 
                         (INPE)}",
                title = "High-temperature plasma immersion ion implantation into metallic 
                         substrates",
                 year = "2009",
         organization = "International Workshop on Plasma-Based Ion Implantation and 
                         Deposition, 10. (PPI\&D).",
             abstract = "The temperature of the substrate has strong influence on the 
                         diffusion coefficient of nitrogen ions during PIII performed in 
                         metallic surfaces, which affect the ion implantation profiles and 
                         can lead to the formation of thick implanted layers. In order to 
                         heat conveniently a large spectrum of metals and metallic alloys 
                         in vacuum and in the presence of plasma, as mandatory for 
                         efficient PIII, it is necessary to count on a stable heat source, 
                         able to reach steady temperatures in the range of 400oC to more 
                         than 1000 oC. This has been accomplished in the current experiment 
                         by means of a thermionic cathode composed of a rolled tantalum 
                         foil covered with (Ba,Sr,Ca)O. Work function of this electron 
                         source is around 1.2 eV, which is much lower than 4.5 eV of 
                         typically used tungsten filament. Metallic samples, in this case, 
                         are the anode of the discharge itself, being polarized during the 
                         heating cycle by positive DC voltages about 500V. They are 
                         implanted with negative pulses of 10 kV/300Hz/40{\`{\i}}s. 
                         Comparison among metallic layers treated under distinct 
                         temperature values will be accomplished by evaluating their 
                         corrosion resistance and tribological properties. Samples will 
                         also be analyzed by X-ray diffraction, SEM and XPS.",
  conference-location = "S{\~a}o Jos{\'e} dos Campos, SP",
      conference-year = "7-11 Sept.",
        urlaccessdate = "31 out. 2020"
}


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