author = "Leal, Gabriela and Fraga, Mariana Amorim and Rasia, L. A. and 
                         Massi, M.",
          affiliation = "{Universidade Federal de S{\~a}o Paulo (UNIFESP)} and {Instituto 
                         Nacional de Pesquisas Espaciais (INPE)} and {Universidade Regional 
                         do Nordeste do Estado do Rio Grande do Sul} and {Universidade 
                         Federal de S{\~a}o Paulo (UNIFESP)}",
                title = "Impact of high N2 flow ratio on the chemical and morphological 
                         characteristics of sputtered N-DLC films",
              journal = "Surface and Interface Analysis",
                 year = "2017",
               volume = "49",
               number = "2",
                pages = "99--106",
                month = "Feb.",
             keywords = "chemical bonding, diamond-like carbon, magnetron sputtering, 
                         morphology, nitrogen incorporation.",
             abstract = "Because of their outstanding characteristics, diamond-like carbon 
                         (DLC) thin films have been recognized as interesting materials for 
                         a variety of applications. For this reason, the effects of the 
                         incorporation of different elements on their fundamental 
                         properties have been the focus of many studies. In this work, 
                         nitrogen-incorporated DLC films were deposited on Si (100) 
                         substrates by DC magnetron sputtering of a graphite target under a 
                         variable N2 gas flow rate in CH4 + N2 + Ar gas mixtures. The 
                         influence of high N2 flow ratios (20, 40 and 60%) on the chemical, 
                         structural and morphological properties of N-DLC films was 
                         investigated. Different techniques including field emission 
                         gun-equipped scanning electron microscope (FEG-SEM), 
                         energy-dispersive X-ray spectroscopy (EDS), atomic force 
                         microscopy (AFM), profilometry, Rutherford backscattering 
                         spectrometry (RBS) and Raman spectroscopy (325-nm and 514-nm 
                         excitation) were used to examine the properties of the N-DLC 
                         films. Thus, the incorporation of nitrogen was correlated with the 
                         morphology, roughness, thickness, structure and chemical bonding 
                         of the films. Overall, the results obtained indicate that the 
                         fundamental properties of N-DLC films are not only related to the 
                         nitrogen content in the film but also to the type of chemical 
                         bonds formed.",
                  doi = "10.1002/sia.6064",
                  url = "http://dx.doi.org/10.1002/sia.6064",
                 issn = "0142-2421",
             language = "en",
           targetfile = "leal_impact.pdf",
        urlaccessdate = "16 abr. 2021"