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@PhDThesis{Mariano:2017:DeFiDL,
               author = "Mariano, Samantha de F{\'a}tima Magalh{\~a}es",
                title = "Deposi{\c{c}}{\~a}o de filmes de DLC no interior de tubos via 
                         implanta{\c{c}}{\~a}o i{\^o}nica por imers{\~a}o em plasma com 
                         campo magn{\'e}tico",
               school = "Instituto Nacional de Pesquisas Espaciais (INPE)",
                 year = "2017",
              address = "S{\~a}o Jos{\'e} dos Campos",
                month = "2017-08-29",
             keywords = "3IP\&D, DLC, campo magn{\'e}tico, catodo oco, tubo 
                         met{\'a}lico, 3IP\&D, DLC, magnetic field, hollow cathode, 
                         metallic tube.",
             abstract = "Nesta tese {\'e} apresentado um estudo sobre a 
                         deposi{\c{c}}{\~a}o de filmes de carbono amorfo tipo diamante 
                         (a-C:H ou DLC, do ingl{\^e}s Diamond-Like Carbon) no interior de 
                         tubos de a{\c{c}}o inoxid{\'a}vel austen{\'{\i}}tico ABNT 304. 
                         Os filmes de DLC foram depositados usando um sistema de 
                         Implanta{\c{c}}{\~a}o I{\^o}nica por Imers{\~a}o em Plasma e 
                         Deposi{\c{c}}{\~a}o (3IP\\&D) na presen{\c{c}}a de campo 
                         magn{\'e}tico (CM). As deposi{\c{c}}{\~o}es foram monitoradas 
                         utilizando-se amostras tubulares de a{\c{c}}o inoxid{\'a}vel, 
                         com 150 mm de comprimento e 2 mm de espessura. Os casos 
                         experimentais foram agrupados de acordo com o di{\^a}metro 
                         externo dos tubos, sendo T1=110 mm, T2=40 mm e T3=20 mm, 
                         respectivamente. Inicialmente, a ruptura e a 
                         manuten{\c{c}}{\~a}o da descarga foram analisadas detalhadamente 
                         na presen{\c{c}}a de campos el{\'e}trico e magn{\'e}tico 
                         cruzados (ExB), em condi{\c{c}}{\~o}es de plasmas diversos com 
                         diferentes gases de trabalho (arg{\^o}nio, nitrog{\^e}nio, 
                         metano e acetileno). Deste modo, os par{\^a}metros experimentais 
                         foram otimizados para se gerar uma descarga luminescente do tipo 
                         catodo oco, no interior dos tubos, com o aux{\'{\i}}lio de campo 
                         magn{\'e}tico no confinamento do plasma. Ap{\'o}s esta etapa de 
                         avalia{\c{c}}{\~a}o, foram realizados experimentos iniciais para 
                         depositar o filme de DLC no interior dos tubos, com o uso de 
                         pastilhas de a{\c{c}}o inoxid{\'a}vel e l{\^a}minas de 
                         sil{\'{\i}}cio para monitorar o crescimento do filme. 
                         Posteriormente, foram propostos alguns ajustes na 
                         configura{\c{c}}{\~a}o experimental com o objetivo de melhorar a 
                         forma{\c{c}}{\~a}o da descarga e promover condi{\c{c}}{\~o}es 
                         otimizadas para o crescimento do filme de DLC no interior dos 
                         tubos. Os resultados experimentais confirmaram a a{\c{c}}{\~a}o 
                         positiva do mecanismo ExB na melhoria do confinamento do plasma e 
                         na estabilidade das descargas de catodo oco que foram produzidas. 
                         Os filmes de DLC foram analisados quanto {\`a} sua 
                         microestrutura, morfologia, propriedades qu{\'{\i}}micas, 
                         mec{\^a}nicas, de corros{\~a}o e tribol{\'o}gicas. Foi 
                         poss{\'{\i}}vel depositar filmes de DLC na superf{\'{\i}}cie 
                         interna de tubos de a{\c{c}}o inoxid{\'a}vel 
                         austen{\'{\i}}tico ABNT 304 com boa ades{\~a}o e boa 
                         resist{\^e}ncia ao desgaste e {\`a} corros{\~a}o. Estas 
                         propriedades s{\~a}o particularmente interessantes para o 
                         revestimento de superf{\'{\i}}cies internas de 
                         tubula{\c{c}}{\~o}es utilizadas no setor aeroespacial e, 
                         tamb{\'e}m, em diversos segmentos da ind{\'u}stria. ABSTRACT: 
                         The aim of this work is to study the deposition of diamond-like 
                         amorphous carbon films (a-C:H) inside AISI 304 stainless steel 
                         austenitic tubes with the aid of magnetic field. DLC films were 
                         deposited inside tubes by using Plasma Immersion Ion Implantation 
                         and Deposition (PIII\&D) technique. PIII\&D processes were 
                         investigated by using tubular steel samples as substrates (150 mm 
                         length and 2 mm thickness). The experimental cases were classified 
                         according to the tube outer diameters, as T1=110 mm, T2=40 mm and 
                         T3=20 mm, respectively. Firstly, the discharges breakdown and 
                         their stability conditions were analyzed in detail under the 
                         effect of (ExB) crossed fields. Discharges of different working 
                         gases were studied, such as argon, nitrogen, methane and 
                         acetylene. In this way, the experimental parameters were optimized 
                         so that a glow discharge of a hollow cathode type (with wall 
                         confinement) could be generated inside the tubes, by using the 
                         magnetic field for additional plasma confinement. Then, the first 
                         DLC deposition experiments were performed to coat the inner of the 
                         substrate tubes. Steel and silicon samples were used to monitor 
                         the growing of the as-deposited DLC films there. Later, the 
                         configuration for tube assembly was adjusted, from sitting on 
                         insulator to suspended position, and the discharge formation was 
                         enhanced. As a result, improvements on the deposition conditions 
                         inside tubes were obtained. The experimental results show the 
                         positive influence of ExB mechanism on the improvement of plasma 
                         confinement and also on the established hollow cathode discharges. 
                         The so obtained DLC films were analyzed as regards to their 
                         microstructure, morphology, chemical and mechanical properties, 
                         corrosion and wear resistances. The inner surfaces of steel tubes 
                         were properly coated with DLC films, which in turn can act as good 
                         protection layers against corrosion and wear. Such properties are 
                         especially interesting for inner surface coating of aerospace fuel 
                         tubes and also of other industrial components with concave 
                         geometry.",
            committee = "Ueda, Mario (presidente/orientador) and Oliveira, Rog{\'e}rio de 
                         Moraes (orientador) and Berni, Luiz {\^A}ngelo and Trava-Airoldi, 
                         Vladimir Jesus and Silva, Maria Margareth da and Kostov, Leide 
                         Lili Gon{\c{c}}alves da Silva",
         englishtitle = "Deposition of diamond-like carbon films inside tubes using plasma 
                         immersion ion implantation with magnetic field",
             language = "pt",
                pages = "193",
                  ibi = "8JMKD3MGP3W34P/3PE5922",
                  url = "http://urlib.net/rep/8JMKD3MGP3W34P/3PE5922",
           targetfile = "publicacao.pdf",
        urlaccessdate = "04 dez. 2020"
}


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