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@MastersThesis{SierraGómez:2019:EsAmCr,
               author = "Sierra G{\'o}mez, Javier",
                title = "Estudo do ambiente de crescimento de filmes monocristalinos de 
                         diamante via MWPACVD",
               school = "Instituto Nacional de Pesquisas Espaciais (INPE)",
                 year = "2019",
              address = "S{\~a}o Jos{\'e} dos Campos",
                month = "2019-05-13",
             keywords = "Diamante CVD, diamante monocristalino, SCD, MWPACVD, plasma, CVD 
                         diamond, single crystal diamond, MWPACVD, plasma.",
             abstract = "A pesquisa para a produ{\c{c}}{\~a}o de diamante CVD (do 
                         ingl{\^e}s Chemical Vapor Deposition) de grau monocristalino 
                         ganhou muita for{\c{c}}a na {\'u}ltima d{\'e}cada pelas 
                         diversas aplica{\c{c}}{\~o}es que esse nobre material 
                         possibilita, como por exemplo, na {\'a}rea tecnol{\'o}gica 
                         industrial de diferentes segmentos e mesmo na {\'a}rea de 
                         obten{\c{c}}{\~a}o de gemas de alta qualidade. Estes resultados 
                         propiciou o aparecimento de diversas parcerias entre centros de 
                         pesquisas e empresas produtoras de diamante, com o prop{\'o}sito 
                         de melhorar as propriedades deste cristal e abrir as portas para o 
                         mercado de alto valor agregado. Existem diversos m{\'e}todos de 
                         obten{\c{c}}{\~a}o de diamante CVD epitaxial, entretanto para a 
                         produ{\c{c}}{\~a}o de diamante homoepitaxial se utiliza a 
                         t{\'e}cnica de deposi{\c{c}}{\~a}o qu{\'{\i}}mica na fase de 
                         vapor assistida por plasma de micro-ondas MWPACVD (do ingl{\^e}s 
                         Microwave Plasma Assisted Chemical Vapor Deposition), de alta 
                         pot{\^e}ncia. No presente trabalho foi desenvolvido um estudo na 
                         busca de par{\^a}metros para o crescimento do diamante 
                         monocristalino SCD (do ingl{\^e}s Single Cristal Diamond) 
                         utilizando justamente a t{\'e}cnica MWPACVD de alta pot{\^e}ncia 
                         (6 kW), sendo este in{\'e}dito no Brasil. Para tal fim, foi 
                         realizado, em um primeiro momento, um estudo do princ{\'{\i}}pio 
                         de funcionamento do reator e determina{\c{c}}{\~a}o das melhores 
                         condi{\c{c}}{\~o}es de crescimento do filme de diamante CVD 
                         policristalino sobre substrato de sil{\'{\i}}cio e em alta 
                         pot{\^e}ncia, acima de 3 kW, para assim definir os melhores 
                         par{\^a}metros para a obten{\c{c}}{\~a}o do monocristal. Foram 
                         utilizadas diversas t{\'e}cnicas de caracteriza{\c{c}}{\~a}o 
                         para analisar a qualidade do filme obtido, como espectroscopia de 
                         espalhamento Raman, Espectroscopia do infravermelho por 
                         transformada de Fourier, microscopia eletr{\^o}nica de varredura, 
                         difratometria de Raio-X, microscopia de for{\c{c}}a at{\^o}mica 
                         e microscopia {\'o}tica com luz polarizada. Os resultados 
                         pr{\'e}vios mostram que os par{\^a}metros adotados para a 
                         produ{\c{c}}{\~a}o de diamante policristalino permitiram obter 
                         filmes de boa qualidade e com {\'o}timas taxas de crescimento. 
                         Tais resultados possibilitaram o avan{\c{c}}o da pesquisa com o 
                         monocristal, sendo obtido um filme de diamante genuinamente 
                         monocristalino com estrutura {\'u}nica de fase <100> de 
                         aproximadamente 1,4 mm de espessura em 62 horas de 
                         deposi{\c{c}}{\~a}o, evidenciando tamb{\'e}m, a excelente taxa 
                         de crescimento, entre 18-24 \μm/h, corroboradas pelas 
                         caracteriza{\c{c}}{\~o}es acima citadas. Durante o 
                         desenvolvimento deste trabalho alguns defeitos foram observados, e 
                         novos estudos s{\~a}o sugeridos para a continuidade. Entretanto, 
                         devido {\`a} complexidade deste assunto, sua continuidade 
                         ser{\'a} focada em uma proposta de doutorado, evidenciando as 
                         aplica{\c{c}}{\~o}es {\'o}pticas e em gemas e j{\'a} com os 
                         devidos interessados neste produto de alto valor agregado. 
                         ABSTRACT: Research on monocrystalline grade CVD diamond (Chemical 
                         Vapor Deposition) or SCD (Single Crystal Diamond) using microwave 
                         plasma assisted chemical vapor deposition technique (MWPACVD), has 
                         been intensified in the last two decades by the various 
                         applications that this great material provides in the 
                         technological and industrial field. Its application is very broad 
                         ranging from heat sinks, semiconductor, optical windows, and even 
                         as gems for jewelry. These results led to the emergence of several 
                         partnerships between research centers and diamond-producing 
                         companies. One of the objectives of this connections is purpose of 
                         improving the properties of this crystal, open a market window and 
                         create a new product with high added value. There are several 
                         methods of obtaining epitaxial CVD diamond, however, the high 
                         power MWPACVD technique is used for the production of 
                         homoepitaxial diamond. MWPACVD due to the high growth rates and 
                         the better control of diamond imperfections and impurities 
                         comparing to others CVD deposition techniques. In the present 
                         work, a study was developed to search for parameters for the 
                         growth of monocrystalline diamond (SCD) using the high-power via 
                         MWPACVD technique (6 kW), which is unprecedented in Brazil. For 
                         this purpose, a study was made of the reactor operating principle 
                         and determination of the best growth parameters. Was deposited 
                         polycrystalline CVD diamond a film on silicon substrate and at 
                         high power input, above 3 kW. According to the previous was 
                         defined the best parameters to obtain single crystal diamond. 
                         Several techniques of characterization were used to analyze the 
                         obtained film quality, such as Raman Scattering Spectroscopy, 
                         Fourier Transform Infrared Spectroscopy, Scanning Electron 
                         Microscopy, X-ray Diffractometry, Atomic Force Microscopy and 
                         Optical Microscopy with polarized light. The preliminary results 
                         show that the parameters adopted for the production of 
                         polycrystalline diamond have yielded good quality films and with 
                         high growth rates. These results allowed the monocrystalline 
                         research advanced, obtaining a genuinely mono crystalline diamond 
                         film with a single structure [100] direction. Diamond was 1,4 mm 
                         thickness in 62 hours of deposition, evidencing also a great 
                         growth rate, of about 18-24 \μm/h evidenced by the 
                         above-mentioned characterizations. During the development of this 
                         work some defects in diamond structure were observed, and new 
                         studies are suggested for the work continuity. However, owing to 
                         the complexity of this subject, its continuity will be focused on 
                         a doctoral proposal, highlighting the optical and gemstone 
                         applications and already with the interested ones in this product 
                         of high added value.",
            committee = "Trava-Airoldi, Vladimir Jesus (presidente/orientador) and Corat, 
                         Evaldo Jos{\'e} and Machado, Jo{\~a}o Paulo Barros and 
                         Salvadori, Maria Cec{\'{\i}}lia Barbosa da Silveira",
         englishtitle = "Study of the growth enviroment of monocrystalline diamond films by 
                         MWPACVD",
             language = "pt",
                pages = "128",
                  ibi = "8JMKD3MGP3W34R/3T772C8",
                  url = "http://urlib.net/rep/8JMKD3MGP3W34R/3T772C8",
           targetfile = "publicacao.pdf",
        urlaccessdate = "27 nov. 2020"
}


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