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@InProceedings{Trava-AiroldiNaCoFuRaCa:2019:InArIg,
               author = "Trava-Airoldi, Vladimir Jesus and Nass, Karina Carvalho de Farias 
                         and Corat, Evaldo Jos{\'e} and Fukumasu, N. and Ramirez, M. and 
                         Capote, G.",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto 
                         Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de 
                         Pesquisas Espaciais (INPE)} and {Universidade de S{\~a}o Paulo 
                         (USP)} and {Universidade do Vale do Para{\'{\i}}ba (UNIVAP)} and 
                         {Universida Nacional de Bogota}",
                title = "Influence of the argon as an ignitor and an agent on DLC 
                         properties growth at pressure as low as 3 x 10-4 mbar by modified 
                         pulsed-DC PECVD method",
                 year = "2019",
         organization = "International Conference on Metallurgical Coatings and Thin Films 
                         (ICMCTF), 46.",
             keywords = "DLC films, DC pulsed PECVD, additional cathode, argon ignitor, 
                         mechanical and trybological properties.",
             abstract = "As reported for many years, hydrogenated DLC films (a-C:H) have 
                         been a choice of a protective coatings for many applications due 
                         to their set of superior mechanical, chemical, tribological and 
                         biological properties such as: high hardness, high wear 
                         resistance, low coefficient of friction, high chemical inertness, 
                         good biocompatibility, bactericide, etc.. However, in order to 
                         improve the adhesion between the DLC and the different metals 
                         substrates a huge modification of a Pulsed DC PECVD technique has 
                         been obtained introducing an additional cathode working as 
                         electron and ion confinement. With these modifications pressure as 
                         low as 10-3 mbar allow operating in collisionless regime improving 
                         not only the adhesion but also a set of DLC proprieties cited 
                         above. So, in this work we present studies concerning more 
                         improvement properties of the DLC films as a function of 
                         confinement of electrons and ions parameters in a plasma discharge 
                         by using argon as an ignitor gas for the interlayer precursor and 
                         keeping it during all the process of DLC deposition. In this case 
                         the best conditions of collisonless operation was reached at 
                         pressure as low as 3.10-4 mbar. Basically, due to the condition of 
                         operating in very low pressure, this technique allows to grow the 
                         DLC film with very good uniformity and higher hardness, higher 
                         adhesion, lower coefficient of friction, less porosity and, also, 
                         provide to be able to get a DLC deposition in the form of 
                         multilayer, like thicker films, promoting less residual stress. 
                         So, studies at the first time, of DLC with superior properties has 
                         been carried out from PECVD technique. More specifically, studies 
                         of the DLC film properties as a function of the argon buffer gas 
                         density and as a function of bias voltage has been done. Raman 
                         scattering spectroscopy, Rockwell indentation, nano indentation, 
                         FEG, and trybological analyses are discussed. Also, the operating 
                         parameters of this modified PECVD system are well controlled, so 
                         that a scaling up studies will also be presented as an important 
                         part of this work.",
  conference-location = "San Diego, CA",
      conference-year = "19-24 May",
             language = "en",
        urlaccessdate = "26 nov. 2020"
}


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