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1. Identity statement
Reference TypeJournal Article
Sitemtc-m21c.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP3W34R/3S4M73E
Repositorysid.inpe.br/mtc-m21c/2018/10.25.12.20   (restricted access)
Last Update2018:10.25.12.20.26 (UTC) administrator
Metadata Repositorysid.inpe.br/mtc-m21c/2018/10.25.12.20.26
Metadata Last Update2020:01.06.11.42.07 (UTC) administrator
DOI10.1016/j.apsusc.2018.09.190
ISSN0169-4332
Citation KeyMarianoUeda:2019:HoCaEf
TitleHollow cathode effects observed in magnetically confined plasmas used for deposition of DLC films via PIII&D in tubes
Year2019
Access Date2024, May 06
Type of Workjournal article
Secondary TypePRE PI
Number of Files1
Size5924 KiB
2. Context
Author1 Mariano, Samantha de Fátima Magalhães
2 Ueda, Mário
Resume Identifier1
2 8JMKD3MGP5W/3C9JHSB
Group1 LABAP-COCTE-INPE-MCTIC-GOV-BR
2 LABAP-COCTE-INPE-MCTIC-GOV-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Nacional de Pesquisas Espaciais (INPE)
Author e-Mail Address1 samantha.magalhaes@inpe.br
2 mario.ueda@inpe.br
JournalApplied Surface Science
Volume465
Pages824-832
Secondary MarkA1_INTERDISCIPLINAR A1_ENGENHARIAS_II A1_ENGENHARIAS_I A2_SAÚDE_COLETIVA A2_MATERIAIS A2_ENGENHARIAS_III A2_CIÊNCIAS_AGRÁRIAS_I B1_QUÍMICA B1_ODONTOLOGIA B1_MEDICINA_III B1_MEDICINA_II B1_MATEMÁTICA_/_PROBABILIDADE_E_ESTATÍSTICA B1_GEOCIÊNCIAS B1_FARMÁCIA B1_ENGENHARIAS_IV B1_CIÊNCIAS_BIOLÓGICAS_I B1_BIOTECNOLOGIA B2_ENSINO B2_CIÊNCIAS_BIOLÓGICAS_II B2_ASTRONOMIA_/_FÍSICA C_BIODIVERSIDADE
History (UTC)2018-10-25 12:20:26 :: simone -> administrator ::
2018-10-25 12:20:26 :: administrator -> simone :: 2018
2018-10-25 12:21:10 :: simone :: 2018 -> 2019
2018-10-25 12:21:10 :: simone -> administrator :: 2019
2020-01-06 11:42:07 :: administrator -> simone :: 2019
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
Version Typepublisher
KeywordsPIII&D
Hollow cathode discharges
DLC films
Magnetic field
AbstractHollow cathode discharges were evaluated under the effects of the E × B crossed fields for deposition of DLC (Diamond-like Carbon) films. The stabilities of various plasma discharges, as well as, the produced plasma confinement were enhanced significantly with the magnetic field application. Experimental tests corroborate the positive action of E × B mechanism for the improvement of PIII&D (Plasma Immersion Ion Implantation and Deposition) in metal tubes. As regards to the structure of the obtained carbon films, the magnetic field application improves their diamond-like character. Magnetically confined plasmas resulted in DLC films with defectfree morphology and lower roughness. Using this type of PIII&D setup is highly recommended for inner surface coating of tubes when highly disordered DLC films are required.
AreaFISPLASMA
Arrangementurlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Hollow cathode effects...
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4. Conditions of access and use
Languageen
Target Filemariano-how.pdf
User Groupsimone
Visibilityshown
Archiving Policydenypublisher denyfinaldraft24
Read Permissiondeny from all and allow from 150.163
Update Permissionnot transferred
5. Allied materials
Next Higher Units8JMKD3MGPCW/3ET2RFS
DisseminationWEBSCI; PORTALCAPES; COMPENDEX.
Host Collectionurlib.net/www/2017/11.22.19.04
6. Notes
Empty Fieldsalternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel e-mailaddress format isbn label lineage mark mirrorrepository month nextedition notes number orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarykey session shorttitle sponsor subject tertiarymark tertiarytype url
7. Description control
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