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1. Identity statement
Reference TypeBook Section
Siteplutao.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP3W/4623N8B
Repositorysid.inpe.br/plutao/2021/12.14.18.24   (restricted access)
Last Update2021:12.14.18.24.34 (UTC) lattes
Metadata Repositorysid.inpe.br/plutao/2021/12.14.18.24.34
Metadata Last Update2022:04.03.23.13.58 (UTC) administrator
DOI10.37572/EdArt_3006213618
ISBN9786587396361
Labellattes: 3956926180174007 2 MonteirodosSantosMitUedDurSan:2021:XRPHSP
Citation KeySantosBarbCoraUeda:2021:FoMeNa
TitleFormation of metal nanoparticles by sputter deposition on UNCD films by NPIII inside conductive tubes
Year2021
Access Date2024, May 09
Secondary TypePRE LI
Number of Files1
Size2506 KiB
2. Context
Author1 Santos, Nazir Monteiro dos
2 Barbosa, Divani Carvalho
3 Corat, Evaldo José
4 Ueda, Mario
Resume Identifier1
2
3 8JMKD3MGP5W/3C9JH33
4 8JMKD3MGP5W/3C9JHSB
ORCID1 0000-0002-1518-9403
2 0000-0003-4938-4095
3 0000-0003-3011-5522
Group1 CSE-ETES-DIPGR-INPE-MCTI-GOV-BR
2
3 COPDT-CGIP-INPE-MCTI-GOV-BR
4 COPDT-CGIP-INPE-MCTI-GOV-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Faculdade Tecnológica (FATEC)
3 Instituto Nacional de Pesquisas Espaciais (INPE)
4 Instituto Nacional de Pesquisas Espaciais (INPE)
Author e-Mail Address1 nazirmonteiro@gmail.com
2 divanibarbosa@gmail.com
3 evaldo.corat@inpe.br
4 riomarioma247@gmail.com
EditorNobre, M. A. L.
Book TitleThe Great World of Nanotechnology Vol II
PublisherEditora Artemis
VolumeVol II
Pages109-124
History (UTC)2021-12-14 18:24:34 :: lattes -> administrator ::
2022-04-03 23:13:58 :: administrator -> simone :: 2021
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
Version Typepublisher
KeywordsPlasma Immersion Ion Implantation. Surface Modification.
Ultrananocrystalline Diamond Films. Conductive tubes
AbstractSurface modification of ultrananocrystalline diamond (UNCD) films by Nitrogen Plasma Immersion Ion Implantation (NPIII) using conductive tubes was studied. UNCD films were deposited on titanium substrates by CVD process using a hot filament reactor. The UNCD films were treated by NPIII inside stainless steel metallic tubes. The tubes, with 150 mm of length and different diameters, containing the UNCD films were placed in the interior of vacuum chamber of 600 liters. Field Emission Gun Scanning Electron Microscopy (FEG-SEM) with Energy Dispersive Spectroscopy (EDS) auxiliary, X-Ray Diffraction (XRD), Raman Scattering Spectroscopy (RSS), and X-ray Photoelectron Spectroscopy (XPS) were used to investigate the effect of NPIII treatment on UNCD films. The results showed that the NPIII treatment changed the surface morphology of UNCD films, increased the degree of disorder and the structural defects, and the formation of metallic nanoparticles by sputter deposition of the materials from the conductive tubes. Surface analysis have also demonstrated substantial dependence of NPIII with the conductive tubes diameter. For the UNCD film treatment by NPIII inside tube with diameter of 110 mm (T110), there was formation of metal oxide and nitride layers on the surface. For the treatment carried out inside the tube with a diameter of 40 mm (T40), there was implantation of metallic particles, indicating that the surface of the UNCD films was completely covered by iron (Feº ).
AreaFISPLASMA
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4. Conditions of access and use
Languagept
Target Filesantos_formation.pdf
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5. Allied materials
Next Higher Units8JMKD3MGPCW/3F35BSP
8JMKD3MGPCW/46KTFK8
8JMKD3MGPCW/46KUES5
URL (untrusted data)https://www.editoraartemis.com.br/artigo/32225/
Host Collectiondpi.inpe.br/plutao@80/2008/08.19.15.01
6. Notes
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