@MastersThesis{Mansur:2016:TrFiFi,
               author = "Mansur, Raquel Alvim de Figueiredo",
                title = "Tratamento de filmes finos de cromo por implanta{\c{c}}{\~a}o 
                         i{\^o}nica por imers{\~a}o em plasma de nitrog{\^e}nio",
               school = "Instituto Nacional de Pesquisas Espaciais (INPE)",
                 year = "2016",
              address = "S{\~a}o Jos{\'e} dos Campos",
                month = "2016-05-30",
             keywords = "plasma, filme fino, cromo, implanta{\c{c}}{\~a}o i{\^o}nica, 
                         nitrog{\^e}nio, plasma, thin film, chromium, ion implantation, 
                         nitrogen.",
             abstract = "O objetivo deste trabalho {\'e} avaliar o comportamento da 
                         superf{\'{\i}}cie do filme de cromo, depositado em a{\c{c}}o 
                         carbono (SAE 1070) atrav{\'e}s da t{\'e}cnica \emph{Magnetron 
                         Sputtering} e tratado posteriormente com nitrog{\^e}nio, 
                         atrav{\'e}s de implanta{\c{c}}{\~a}o i{\^o}nica por 
                         imers{\~a}o em plasma (3IP). Para o tratamento 3IP utilizam-se 
                         duas fontes de plasma distintas: descarga DC e descarga tipo 
                         catodo oco, com varia{\c{c}}{\~a}o do tempo de tratamento. Esses 
                         dois experimentos foram realizados sequencialmente e sem quebra de 
                         v{\'a}cuo, na mesma c{\^a}mara. Realizou-se tamb{\'e}m 
                         tratamentos de 3IP nas temperaturas de 400\$^{o}\$C, 
                         500\$^{o}\$C e 600\$^{o}\$C em outro sistema de 
                         implanta{\c{c}}{\~a}o (3IPAT), ap{\'o}s a deposi{\c{c}}{\~a}o 
                         do filme. Ap{\'o}s os tratamentos, realizaram-se as seguintes 
                         caracteriza{\c{c}}{\~o}es: DRX por {\^a}ngulo rasante, XPS, 
                         AFM, MEV, avalia{\c{c}}{\~a}o das propriedades 
                         tribol{\'o}gicas, nanoindenta{\c{c}}{\~a}o, esclerometria e 
                         estudos de corros{\~a}o. A an{\'a}lise por XPS mostrou a 
                         forma{\c{c}}{\~a}o de nitretos de cromo. O ensaio de tribologia 
                         mostrou redu{\c{c}}{\~a}o do coeficiente de atrito, 
                         principalmente para a amostra com tempo de duas horas de 
                         implanta{\c{c}}{\~a}o. Todas as amostras tratadas por 3IP 
                         apresentaram aumento da dureza e da resist{\^e}ncia ao risco. 
                         Quanto {\`a} corros{\~a}o, n{\~a}o foi evidenciada 
                         influ{\^e}ncia no potencial eletroqu{\'{\i}}mico. Os resultados 
                         obtidos comprovaram a efic{\'a}cia do tratamento 3IP em filmes 
                         finos quanto {\`a} forma{\c{c}}{\~a}o de nitretos e {\`a} 
                         melhoria das suas propriedades superficiais. ABSTRACT: The aim of 
                         this study is to evaluate the behavior of the chromium surface 
                         film, deposited on carbon steel (SAE 1070) by Magnetron Sputtering 
                         and treated with nitrogen, by plasma immersion ion implantation 
                         (PIII). For the PIII treatment, two sources were used: DC 
                         discharge and hollow cathode discharge, with variation of the 
                         treatment time. These two experiments were carried out in sequence 
                         and without breaking vacuum, in the same chamber. PIII treatments 
                         were also done at temperatures of 400\$^{o}\$ C, 500\$^{o}\$ C 
                         and 600\$^{o}\$ C in another implantation system (HTPIII), after 
                         the film deposition. After the treatments, the following 
                         characterizations were done: grazing incidence XRD, XPS, AFM, SEM, 
                         evaluation of tribological properties, Nanoindentation, scratch 
                         testing and corrosion studies. XPS analysis showed the formation 
                         of chromium nitrides. Tribology tests showed a reduction in the 
                         friction coefficient, mainly for the sample with 2 hours of 
                         implantation. All treated samples presented high hardness and 
                         scratch resistance. For corrosion, there was no evident influence 
                         on the electrochemical potential. The obtained results have proved 
                         the effectiveness of PIII treatment on thin films with the 
                         formation of nitrides and the improvement of their surface 
                         properties.",
            committee = "Mello, Carina Barros (presidente/orientadora) and Ueda, Mario 
                         (orientador) and Oliveira, Rog{\'e}rio de Moraes and Vasconcelos, 
                         Get{\'u}lio de",
           copyholder = "SID/SCD",
         englishtitle = "Treatment of chrome thin films by plasma immersion ion 
                         implantation",
             language = "pt",
                pages = "143",
                  ibi = "8JMKD3MGP3W34P/3LREU95",
                  url = "http://urlib.net/ibi/8JMKD3MGP3W34P/3LREU95",
           targetfile = "publicacao.pdf",
        urlaccessdate = "03 jun. 2024"
}