@Article{AzevedoBarrSerrFerr:2006:SERaAn,
author = "Azevedo, Adriana Faria and Barros, R. C. M. and Serrano, S. H. P.
and Ferreira, Neidenei Gomes",
affiliation = "Instituto Nacional de Pesquisas Espaciais, Laborat{\'o}rio
Associado de Sensores e Materiais, (INPE, LAS) and {Instituto de
Qu{\'{\i}}mica-IQ/USP} and {Instituto de
Qu{\'{\i}}mica-IQ/USP} and Instituto Nacional de Pesquisas
Espaciais, Laborat{\'o}rio Associado de Sensores e Materiais,
(INPE, LAS)",
title = "SEM and Raman analysis of boron-doped diamond coating on spherical
textured substrates",
journal = "Surface and Coatings Technology",
year = "2006",
volume = "200",
number = "20/21",
pages = "5973--5977",
month = "May",
keywords = "spherical boron doped diamond, stress, diamond purity,
CHEMICAL-VAPOR-DEPOSITION, X-RAY-DIFFRACTION, CVD DIAMOND,
RESIDUAL-STRESSES, THIN-FILMS, ELECTRODES, PRESSURE, GROWTH.",
abstract = "In this work boron-doped diamond (BDD) films were grown on new
geometric form substrate. A laser texturized pretreatment on these
substrates has promoted a better adherence between film and
substrate, and a decrease of diamond total stress. Films
morphology, obtained from Scanning Electron Microscopy (SEM)
images, have showed that diamond average grain size, between 10-15
mu m, decreased when the boron doping level was increased. For the
micro-Raman spectroscopy, spectra analyses performed on each
sample have allowed the residual stress evaluation and the diamond
purity, from diamond and graphitic Raman peaks shifts. In these
films, residual stress increased from 0.2 to 1.2 GPa and diamond
purity decreased from 99.6% to 92.6% as the doping level
increased. A specific study of morphology, total stress and
diamond purity as a function of methane concentration was done for
diamond film doped with 10,000 ppm B/C. It was observed a
significant increase of grain size and total stress but little
variation of diamond purity as methane concentration was
increased. All these results gave us support for the use of these
devices in different applications.",
copyholder = "SID/SCD",
issn = "0257-8972",
language = "en",
targetfile = "SEM and Raman analysis of boron.pdf",
urlaccessdate = "29 jun. 2024"
}