@Article{AzevedoBarrSerrFerr:2006:SERaAn,
               author = "Azevedo, Adriana Faria and Barros, R. C. M. and Serrano, S. H. P. 
                         and Ferreira, Neidenei Gomes",
          affiliation = "Instituto Nacional de Pesquisas Espaciais, Laborat{\'o}rio 
                         Associado de Sensores e Materiais, (INPE, LAS) and {Instituto de 
                         Qu{\'{\i}}mica-IQ/USP} and {Instituto de 
                         Qu{\'{\i}}mica-IQ/USP} and Instituto Nacional de Pesquisas 
                         Espaciais, Laborat{\'o}rio Associado de Sensores e Materiais, 
                         (INPE, LAS)",
                title = "SEM and Raman analysis of boron-doped diamond coating on spherical 
                         textured substrates",
              journal = "Surface and Coatings Technology",
                 year = "2006",
               volume = "200",
               number = "20/21",
                pages = "5973--5977",
                month = "May",
             keywords = "spherical boron doped diamond, stress, diamond purity, 
                         CHEMICAL-VAPOR-DEPOSITION, X-RAY-DIFFRACTION, CVD DIAMOND, 
                         RESIDUAL-STRESSES, THIN-FILMS, ELECTRODES, PRESSURE, GROWTH.",
             abstract = "In this work boron-doped diamond (BDD) films were grown on new 
                         geometric form substrate. A laser texturized pretreatment on these 
                         substrates has promoted a better adherence between film and 
                         substrate, and a decrease of diamond total stress. Films 
                         morphology, obtained from Scanning Electron Microscopy (SEM) 
                         images, have showed that diamond average grain size, between 10-15 
                         mu m, decreased when the boron doping level was increased. For the 
                         micro-Raman spectroscopy, spectra analyses performed on each 
                         sample have allowed the residual stress evaluation and the diamond 
                         purity, from diamond and graphitic Raman peaks shifts. In these 
                         films, residual stress increased from 0.2 to 1.2 GPa and diamond 
                         purity decreased from 99.6% to 92.6% as the doping level 
                         increased. A specific study of morphology, total stress and 
                         diamond purity as a function of methane concentration was done for 
                         diamond film doped with 10,000 ppm B/C. It was observed a 
                         significant increase of grain size and total stress but little 
                         variation of diamond purity as methane concentration was 
                         increased. All these results gave us support for the use of these 
                         devices in different applications.",
           copyholder = "SID/SCD",
                 issn = "0257-8972",
             language = "en",
           targetfile = "SEM and Raman analysis of boron.pdf",
        urlaccessdate = "29 jun. 2024"
}