@Article{UedaBeRoBaGoBeAb:2001:PlImIo,
               author = "Ueda, Mario and Berni, Luis Angelo and Rossi, Jos{\'e} Osvaldo 
                         and Barroso, Joaquim Jose and Gomes, Geraldo Francisco and Beloto, 
                         Antonio Fernando and Abramof, Eduardo",
          affiliation = "Instituto Nacional de Pesquisas Espaciais, Laborat{\'o}rio 
                         Associado de Plasmas, (INPE, LAP)",
                title = "Plasma immersion ion implantation experiments at the Instituto 
                         Nacional de Pesquisas Espaciais",
              journal = "Surface and Coatings Technology",
                 year = "2001",
               volume = "136",
               number = "1-3",
                pages = "28--31",
                month = "Feb",
             keywords = "plasma immersion ion implantation, surface modification, silicon 
                         nitride, iron nitride, high voltage pulse generators / 
                         HIGH-VOLTAGE, NITROGEN, SILICON.",
             abstract = "Historical perspective of the development of PIII devices at the 
                         Institute Nacional de Pesquisas Espaciais (INPE) is given, 
                         together with the description of the present system under 
                         operation and our overall results on this three-dimensional 
                         implantation research. Starting with an ignitron switched pulser 
                         (1 pulse per 3 min) and an intermittent microwave plasma, we 
                         improved our PIII system developing a pulse forming network (PFN) 
                         based pulser (20 Hz), 2 years later. We also improved our plasma 
                         source towards a DC, highly stable, medium density glow discharge 
                         system. A much faster hard tube pulser was recently incorporated 
                         to our PIII system (670 Hz) allowing us to achieve good 
                         implantation results in different materials. Presently, we are 
                         testing a recently purchased RUP-4 commercial pulser to obtain are 
                         prevented, 1.1 kHz, square pulses for new experiments in this 
                         active field of PIII research. (C) 2001 Elsevier Science B.V. AU 
                         rights reserved.",
           copyholder = "SID/SCD",
                 issn = "0257-8972",
             language = "en",
           targetfile = "50.pdf",
        urlaccessdate = "16 jun. 2024"
}