@InProceedings{BelotoRoLeKuFaUe:2003:CoRaSp,
author = "Beloto, Antonio Fernando and Rosa, Reinaldo Roberto and Leite,
Nelia Ferreira and Kuranaga, Carlos and Fabbri, Maur{\'{\i}}cio
and Ueda, M{\'a}rio",
title = "Correlation between Raman spectra measurements and gradient
pattern analysis of annealed porous silicon implanted with
nitrogen by plasma immersion {\'{\i}}on implantation",
booktitle = "Proceedings...",
year = "2003",
organization = "International Conference on Amorphous \& Microcrystalline
Semiconductors: Science \& Technology, 20.",
conference-location = "Campos do Jord{\~a}o",
conference-year = "25 - 29 ago. 2003",
language = "en",
urlaccessdate = "15 jun. 2024"
}