@InProceedings{PillacaRamiTrav:2016:NuStPE,
author = "Pillaca, Elver Juan de Dios Mitma and Ramirez, M. A. and Trava
Airoldi, Vladimir Jesus",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and
{Universidade Federal de S{\~a}o Paulo (UNIFESP)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)}",
title = "Numerical study of PECVD process with active screen as an
additional cathode to the growth of DLC films",
year = "2016",
organization = "Congresso Brasileiro de Aplica{\c{c}}{\~o}es de V{\'a}cuo na
Ind{\'u}stria e na Ci{\^e}ncia, 38. (CBrAVIC)",
conference-location = "Bauru, SP",
conference-year = "09-12 out.",
targetfile = "pillaca_numerical.pdf",
urlaccessdate = "18 jun. 2024"
}