@Article{SilvaFraYokFerCor:2002:SyRaXr,
author = "Silva, Leide Lili Gon{\c{c}}alves da and Franco, Margareth K. and
Yokaichiya, Fabiano and Ferreira, Neidenei Gomes and Corat, Evaldo
Jos{\'e}",
affiliation = "Instituto Nacional de Pesquisas Espaciais, Laborat{\'o}rio
Associado de Sensores e Materiais (INPE.LAS) and {Laborat{\'o}rio
Nacional de Luz Sincotron (LNLS)} and {Universidade Estadual de
Campinas (UNICAMP)} and {Instituto Nacional de Pesquisas Espaciais
(INPE)} and {Instituto Nacional de Pesquisas Espaciais (INPE)}",
title = "Synchrotron radiation X-ray analysis of boron-doped diamond films
grown by hot-filament assisted chemical vapor deposition",
journal = "Diamond and Related Materials",
year = "2002",
volume = "11",
number = "2",
pages = "153--159",
month = "Feb",
keywords = "materials physics, boron-doped diamond, synchrotron radiation,
X-ray diffraction, diamante, radia{\c{c}}{\~a}o,
difra{\c{c}}{\~a}o de raio X.",
abstract = "This paper presents a synchrotron X-ray radiation analysis of
boron-doped diamond films grown by hot-filament assisted chemical
vapor deposition (HFCVD). The diamond films were grown at
different doping levels with the introduction of boron to the gas
mixture by bubbling hydrogen in a B2O3 solution in methanol. The
B/C ratio in methanol varied from 2000 to 20 000 ppm and the gas
flow rates were controlled so that boron incorporation to the film
varied in the range from 10(18) to 10(21) boron/ cm(3). All other
process parameters were kept unchanged to allow comparison only of
the influence of the doping level. The film. analyses were
performed at the X-ray diffraction beamline of the Laboratorio
Nacional de Luz Sincrotron - LNLS, Brazil. The Debye-Scherrer
configuration was used in this study. A high intensity
monochromatic beam at lambda = 1.46 A was used and an excellent
signal to noise ratio was obtained for 2theta varying from
20degrees to 150degrees. The difractogram for the undoped diamond
film show intense peaks from the (111), (220), (311), (400) and
(331) crystallographic planes. For the boron-doped films a set of
new diffraction lines appear and their intensities increase
considerably with the doping level. The set of diffraction peaks
of similar intensities are related to a hexagonal structure and
were assigned with hi-h confidence to tungsten carbide. This
reveals that the boron-doping process in HFCVD facilitates the
incorporation of tungsten carbide from the filament in the diamond
film. The FWHM analysis of the diamond diffraction peaks shows a
dependence of film crystallinity with doping level with a definite
maximum at approximately 2.3 X 10(19) boron/cm(3).",
copyholder = "SID/SCD",
isbn/issn = "0925-9635",
issn = "0925-9635",
language = "en",
targetfile = "1-s2.0-S0925963501005738-main.pdf",
urlaccessdate = "29 jun. 2024"
}