@InProceedings{ReisBeloUeda:2004:AnEfSa,
               author = "Reis, J. C. N. and Beloto, Antonio Fernando and Ueda, M{\'a}rio",
          affiliation = "{} and {Instituto Nacional de Pesquisas Espaciais (INPE)} and 
                         {Instituto Nacional de Pesquisas Espaciais (INPE)}",
                title = "Annealing effects in samples of silicon implanted with helium by 
                         plasma immersion ion implantation (PIII)",
                 year = "2004",
         organization = "European Conference on Accelerators in Applied Research and 
                         Technology, 8. (ECAART)",
  conference-location = "Paris, Fran{\c{c}}a",
             language = "en",
        urlaccessdate = "15 jun. 2024"
}