@InCollection{FragaBosiNegr:2015:SiCaMi,
author = "Fraga, Mariana Amorim and Bosi, Matteo and Negri, Marco",
title = "Silicon Carbide in Microsystem Technology — Thin Film Versus Bulk
Material",
booktitle = "Advanced Silicon Carbide Devices and Processing",
publisher = "Intech",
year = "2015",
editor = "Saddow, S. and La Via, F.",
pages = "256",
keywords = "Silicon.",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)}",
label = "self-archiving-INPE-MCTI-GOV-BR",
language = "en",
targetfile = "SiC_thin_film_bulk.pdf",
urlaccessdate = "15 jun. 2024"
}