@Article{MitmaPillacaCoMaFeSiRoTr:2024:PrBoDi,
author = "Mitma Pillaca, Elver Juan de Dios and Correia, Rebeca Falc{\~a}o
Borja de Oliveira and Martins, Gislene Valdete and Ferreira, Saulo
Ribeiro and Silva, Tiago Fiorini da and Rodrigues, Cleber Lima and
Trava Airoldi, Vladimir Jesus",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de
Pesquisas Espaciais (INPE)} and {Universidade Federal de S{\~a}o
Paulo (UNIFESP)} and {Universidade de S{\~a}o Paulo (USP)} and
{Universidade de S{\~a}o Paulo (USP)} and {Instituto Nacional de
Pesquisas Espaciais (INPE)}",
title = "Preparation of boron-doped diamond-like carbon films via
enhanced-PECVD using an additional cathode",
journal = "Surface and Coatings Technology",
year = "2024",
volume = "478",
pages = "e130432",
month = "Feb.",
keywords = "Additional cathode, B:DLC, Boron doped DLC films, Bubbler,
Modified PECVD, Tribological coatings, Trimethylborate.",
abstract = "Boron-doped Diamond-Like Carbon (B:DLC) films with different
concentrations of boron were produced in an Enhanced-PECVD reactor
using trimethylborate (TMB) vapor as the boron source. An
additional cathode system was incorporated inside the reactor to
confine the plasma to grow B:DLC film on polished Ti-6Al-4 V and
Silicon samples. The boron-containing coatings were evaluated and
compared to a boron-free coating through several characterization
techniques. Raman spectroscopy, Nano-hardness, XPS, RBS, and SEM
techniques were employed to study the microstructure, hardness,
chemical composition and bonding state, and morphology of the
samples. Ball-on-disc tests were also conducted, using a
tribometer to measure the friction coefficient and wear
resistance. Boron was confirmed in the DLC film structure by XPS
and RBS analyses. The XPS measurements showed that the boron
bonding was accompanied by a higher content oxygen than carbon
content, which increased with the TMB concentration. The sp3
content was evaluated, and the result showed a decrease of about
30 % with the higher solution concentration. As a consequence, the
friction coefficient, wear, and hardness were affected. However,
the adherence of the films was not compromised. Finally, our study
indicated that the PECVD deposition system employing an additional
cathode was suitable for the incorporation of boron into DLC
films.",
doi = "10.1016/j.surfcoat.2024.130432",
url = "http://dx.doi.org/10.1016/j.surfcoat.2024.130432",
issn = "0257-8972",
language = "en",
targetfile = "1-s2.0-S0257897224000628-main.pdf",
urlaccessdate = "16 jun. 2024"
}