@Article{RodriguesPrioFrei:2006:EfGrCo,
               author = "Rodrigues, Gil Capote and Prioli, R. and Freite J{\'u}nior, F. 
                         L.",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and 
                         Departamento de F{\'{\i}}sica, Pontif{\'{\i}}cia Universidade 
                         Cat{\'o}lica do Rio de Janeiro (PUC-RJ) and Departamento de 
                         F{\'{\i}}sica, Pontif{\'{\i}}cia Universidade Cat{\'o}lica do 
                         Rio de Janeiro (PUC-RJ)",
                title = "Effects of the growth conditions on the roughness of amorphous 
                         hydrogenated carbon films deposited by plasma enhanced chemical 
                         vapor deposition",
              journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and 
                         Films",
                 year = "2006",
               volume = "26",
               number = "6",
                pages = "2212--2216",
                month = "Nov./Dec.",
             abstract = "The surface roughness and scaling behavior of a-C:H films 
                         deposited by plasma enhanced chemical vapor deposition from CH4Ar 
                         mixtures were studied using atomic force microscopy. Raman 
                         spectroscopy gives some insights about the film microstructure. 
                         The film surface roughness is shown to decrease with the increase 
                         of deposition negative self-bias, while the presence of Ar ions 
                         enhances this effect. An analysis of the film surface and scaling 
                         behavior suggests that there is a transition of the mechanism of 
                         the film growth from a random deposition with surface diffusion 
                         process to a thermal spike based process that occurs upon the 
                         increase of the negative self-bias voltage and the argon 
                         bombardment.",
           copyholder = "SID/SCD",
                 issn = "0734-2101",
             language = "en",
           targetfile = "Effects of growth conditions.pdf",
        urlaccessdate = "02 maio 2024"
}