@Article{BarbosaBaldTravCora:2014:AcEnGr,
               author = "Barbosa, Divani Carvalho and Baldan, Mauricio Ribeiro and 
                         Trava-Airoldi, Vladimir Jesus and Corat, Evaldo Jose",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto 
                         Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de 
                         Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas 
                         Espaciais (INPE)}",
                title = "Activation energies for the growth of diamond films and the 
                         renucleation of diamond grains during film growth",
              journal = "Journal of Vacuum Science and Technology B: Nanotechnology and 
                         Microelectronics",
                 year = "2014",
               volume = "32",
               number = "3",
                pages = "031808",
                month = "May/June",
             keywords = "diamond films, diamond grains, film growth.",
             abstract = "The effect of substrate temperature upon the growth rate and the 
                         properties of diamond thin films grown with different grains sizes 
                         is explored. An argon-free and argon-rich gas mixture of methane 
                         and hydrogen is used in a hot filament chemical vapor deposition 
                         reactor. Characterization of the films is accomplished by scanning 
                         electron microscopy, Raman spectroscopy and high-resolution x-ray 
                         diffraction. Arrhenius plots of the mass gain, thickness growth, 
                         and renucleation rate as a function of the substrate temperature 
                         are used to obtain the values of the activation energies. An 
                         extensive comparison of the activation energy values obtained in 
                         this study with those found in the literature suggests that there 
                         are distinct common trends for microcrystalline and ballaslike 
                         diamond growth. Besides the activation energy values, the 
                         morphology, crystallite size, sp2 quantification, mass gain, 
                         thickness growth, and renucleation rate present similar tendencies 
                         with the substrate temperature, despite a large variation in the 
                         gas mixture composition. Included is a discussion of the possible 
                         reasons for these observations.",
                  doi = "10.1116/1.4874308",
                  url = "http://dx.doi.org/10.1116/1.4874308",
                 issn = "1071-1023",
                label = "scopus 2014-05 BarbosaBaldTravCora:2014:AcEnGr",
             language = "en",
           targetfile = "1.4874308.pdf",
                  url = "http://dx.doi.org/10.1116/1.4874308",
        urlaccessdate = "03 maio 2024"
}