@Article{DiasBeSiNaCaTr:2014:PhSpTh,
author = "Dias, D. T. and Bedeschi, V. C. and Silva, A. Ferreira da and
Nakamura, O. and Castro Meira, M. V. and Trava-Airoldi, Vladimir
Jesus",
affiliation = "{Universidade Tecnol{\'o}gica Federal do Paran{\'a} (UFTPR)} and
{Universidade Federal da Bahia (UFBA)} and {Universidade Federal
da Bahia} and {Universidade Federal da Bahia} and {Universidade
Federal da Bahia} and {Instituto Nacional de Pesquisas Espaciais
(INPE)}",
title = "Photoacoustic spectroscopy and thermal diffusivity measurement on
hydrogenated amorphous carbon thin films deposited by
plasma-enhanced chemical vapor deposition",
journal = "Diamond and Related Materials",
year = "2014",
volume = "48",
pages = "1--5",
month = "Sep.",
keywords = "Diamond-like carbon, PECVD, Thermo-optical properties.",
abstract = "In this work, the photoacoustic spectroscopy and the open
photoacoustic cell method are employed in the thermo-optical
characterization of hydrogenated amorphous carbon thin films. The
samples were fabricated in a modified plasma-enhanced chemical
vapor deposition system with varying deposition time from 2 to 30
min. The optical absorption spectrum was determined for
wavelengths of 300 to 2200 nm. The optical transmission spectrum
was also recorded from photoacoustic spectroscopy. The energy gap
was determined from the optical absorption spectra. The thermal
diffusivity was found using open photoacoustic cell technique. The
thickness of the films was confirmed to be an important parameter
for the optimization of the fabrication process and the
improvement of thermo-optical performances of the thin films.
Spectroscopic results showed lower absorption and UV transparency
for the thinner film. In the infrared region the -OH band
decreased with increasing film thickness. On the other hand, the
thermal diffusivity measurement presented an increase of this
variable with decreasing film thickness.",
doi = "10.1016/j.diamond.2014.06.003",
url = "http://dx.doi.org/10.1016/j.diamond.2014.06.003",
issn = "0925-9635",
label = "isi 2014-11 DiasBeSiNaCaTr:2014:PhSpTh",
language = "en",
targetfile = "Dias_photoacoustic.pdf",
urlaccessdate = "26 abr. 2024"
}