@InProceedings{UedaAbBeBeReGu:2000:HiDoNi,
               author = "Ueda, M{\'a}rio and Abramof, Eduardo and Beloto, Antonio Fernando 
                         and Berni, Luiz Angelo and Reuther, H. and Guenzel, R.",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto 
                         Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de 
                         Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas 
                         Espaciais (INPE)}",
                title = "High dose nitrogen and carbon shallow implantation in Si by plasma 
                         immersion ion implantation",
                 year = "2000",
         organization = "International Conference on Ion Beam Modification of Materials, 
                         12.",
                 note = "Publicado em: Nuclear Instruments and Methods in Physics Research 
                         B, v.175-177, p.715-720, 2001.",
  conference-location = "Canela, RS",
             language = "en",
        urlaccessdate = "04 maio 2024"
}