%0 Conference Proceedings
%4 sid.inpe.br/mtc-m21b/2015/04.09.12.40
%2 sid.inpe.br/mtc-m21b/2015/04.09.12.40.55
%T A high-voltage pulse generation for plasma ion immersion implantation applications
%D 1997
%A Spassov, V. A.,
%A Ueda, Mário,
%A Barroso de Castro, Joaquim José,
%@affiliation
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@affiliation Instituto Nacional de Pesquisas Espaciais (INPE)
%@electronicmailaddress
%@electronicmailaddress ueda@plasma.inpe.br
%@electronicmailaddress barroso@plasma.inpe.br
%B IEEE International Pulsed Power Conference, 11.
%C Baltimore, MA
%8 29 June - 2 July
%@language en
%3 1997_spassov.pdf