@InProceedings{ReisBeloUeda:2005:PoSiOb,
               author = "Reis, J. C. N. and Beloto, Antonio Fernando and Ueda, M{\'a}rio",
          affiliation = "{} and {Instituto Nacional de Pesquisas Espaciais (INPE)} and 
                         {Instituto Nacional de Pesquisas Espaciais (INPE)}",
                title = "Porous silicon obtained by vapour etching and implanted with 
                         helium by plasma immersion ion implantation",
                 year = "2005",
         organization = "Congresso Brasileiro de Aplica{\c{c}}{\~o}es de V{\'a}cuo na 
                         Ind{\'u}stria e na Ci{\^e}ncia, 26. (CEBRAVIC)",
  conference-location = "Londrina, PR",
      conference-year = "27-29 jul.",
        urlaccessdate = "13 maio 2024"
}