@InCollection{FragaBosiNegr:2015:SiCaMi,
               author = "Fraga, Mariana Amorim and Bosi, Matteo and Negri, Marco",
                title = "Silicon Carbide in Microsystem Technology — Thin Film Versus Bulk 
                         Material",
            booktitle = "Advanced Silicon Carbide Devices and Processing",
            publisher = "Intech",
                 year = "2015",
               editor = "Saddow, S. and La Via, F.",
                pages = "256",
             keywords = "Silicon.",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)}",
                label = "self-archiving-INPE-MCTI-GOV-BR",
             language = "en",
           targetfile = "SiC_thin_film_bulk.pdf",
        urlaccessdate = "27 abr. 2024"
}