@Article{UedaSilvSantSouz:2017:PlImIo,
author = "Ueda, M{\'a}rio and Silva, Carla da and Santos, Nazir Monteiro
dos and Souza, G. B.",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de
Pesquisas Espaciais (INPE)} and {Universidade Estadual de Ponta
Grossa (UEPG)}",
title = "Plasma immersion ion implantation (and deposition) inside metallic
tubes of different dimensions and configurations",
journal = "Nuclear Instruments and Methods in Physics Research Section B:
Beam Interactions with Materials and Atoms",
year = "2017",
volume = "409",
pages = "202--208",
month = "Oct.",
keywords = "PLASMA immersion ion implantationDeposition inside metallic
tubesTubes with different dimensions and configurationsHigh
temperature PIII.",
abstract = "There is a strong need for developing methods to coat or implant
ions inside metallic tubes for many practical contemporary
applications, both for industry and science. Therefore, stainless
steel tubes with practical diameters of 4, 11 and 16 cm, but short
lengths of 20 cm, were internally treated by nitrogen plasma
immersion ion implantation (PIII). Different configurations as
tube with lid in one of the ends or both sides open were tested
for better PIII performance, in the case of smallest diameter
tube. Among these PIII tests in tubes, using the 4 cm diameter one
with a lid, it was possible to achieve tube temperatures of more
than 700 °C in 15 min and maintain it during the whole treatment
time (typically 2 h). Samples made of different materials were
placed at the interior of the tube, as the monitors for posterior
analysis, and the tube was solely pulsed by high voltage pulser
producing high voltage glow discharge and hollow cathode discharge
both driven by a moderate power source. In this experiment,
samples of SS 304, pure Ti, Ti6Al4V and Si were used for the tests
of the above methods. Results on the analysis of the surface of
these nitrogen PIII treated materials, as well as on their
processing methods, are presented and discussed in the paper.",
doi = "10.1016/j.nimb.2017.03.073",
url = "http://dx.doi.org/10.1016/j.nimb.2017.03.073",
issn = "0168-583X",
language = "en",
targetfile = "ueda_plasma.pdf",
urlaccessdate = "04 maio 2024"
}