@MastersThesis{SierraGómez:2019:EsAmCr,
author = "Sierra G{\'o}mez, Javier",
title = "Estudo do ambiente de crescimento de filmes monocristalinos de
diamante via MWPACVD",
school = "Instituto Nacional de Pesquisas Espaciais (INPE)",
year = "2019",
address = "S{\~a}o Jos{\'e} dos Campos",
month = "2019-05-13",
keywords = "Diamante CVD, diamante monocristalino, SCD, MWPACVD, plasma, CVD
diamond, single crystal diamond, MWPACVD, plasma.",
abstract = "A pesquisa para a produ{\c{c}}{\~a}o de diamante CVD (do
ingl{\^e}s Chemical Vapor Deposition) de grau monocristalino
ganhou muita for{\c{c}}a na {\'u}ltima d{\'e}cada pelas
diversas aplica{\c{c}}{\~o}es que esse nobre material
possibilita, como por exemplo, na {\'a}rea tecnol{\'o}gica
industrial de diferentes segmentos e mesmo na {\'a}rea de
obten{\c{c}}{\~a}o de gemas de alta qualidade. Estes resultados
propiciou o aparecimento de diversas parcerias entre centros de
pesquisas e empresas produtoras de diamante, com o prop{\'o}sito
de melhorar as propriedades deste cristal e abrir as portas para o
mercado de alto valor agregado. Existem diversos m{\'e}todos de
obten{\c{c}}{\~a}o de diamante CVD epitaxial, entretanto para a
produ{\c{c}}{\~a}o de diamante homoepitaxial se utiliza a
t{\'e}cnica de deposi{\c{c}}{\~a}o qu{\'{\i}}mica na fase de
vapor assistida por plasma de micro-ondas MWPACVD (do ingl{\^e}s
Microwave Plasma Assisted Chemical Vapor Deposition), de alta
pot{\^e}ncia. No presente trabalho foi desenvolvido um estudo na
busca de par{\^a}metros para o crescimento do diamante
monocristalino SCD (do ingl{\^e}s Single Cristal Diamond)
utilizando justamente a t{\'e}cnica MWPACVD de alta pot{\^e}ncia
(6 kW), sendo este in{\'e}dito no Brasil. Para tal fim, foi
realizado, em um primeiro momento, um estudo do princ{\'{\i}}pio
de funcionamento do reator e determina{\c{c}}{\~a}o das melhores
condi{\c{c}}{\~o}es de crescimento do filme de diamante CVD
policristalino sobre substrato de sil{\'{\i}}cio e em alta
pot{\^e}ncia, acima de 3 kW, para assim definir os melhores
par{\^a}metros para a obten{\c{c}}{\~a}o do monocristal. Foram
utilizadas diversas t{\'e}cnicas de caracteriza{\c{c}}{\~a}o
para analisar a qualidade do filme obtido, como espectroscopia de
espalhamento Raman, Espectroscopia do infravermelho por
transformada de Fourier, microscopia eletr{\^o}nica de varredura,
difratometria de Raio-X, microscopia de for{\c{c}}a at{\^o}mica
e microscopia {\'o}tica com luz polarizada. Os resultados
pr{\'e}vios mostram que os par{\^a}metros adotados para a
produ{\c{c}}{\~a}o de diamante policristalino permitiram obter
filmes de boa qualidade e com {\'o}timas taxas de crescimento.
Tais resultados possibilitaram o avan{\c{c}}o da pesquisa com o
monocristal, sendo obtido um filme de diamante genuinamente
monocristalino com estrutura {\'u}nica de fase <100> de
aproximadamente 1,4 mm de espessura em 62 horas de
deposi{\c{c}}{\~a}o, evidenciando tamb{\'e}m, a excelente taxa
de crescimento, entre 18-24 \μm/h, corroboradas pelas
caracteriza{\c{c}}{\~o}es acima citadas. Durante o
desenvolvimento deste trabalho alguns defeitos foram observados, e
novos estudos s{\~a}o sugeridos para a continuidade. Entretanto,
devido {\`a} complexidade deste assunto, sua continuidade
ser{\'a} focada em uma proposta de doutorado, evidenciando as
aplica{\c{c}}{\~o}es {\'o}pticas e em gemas e j{\'a} com os
devidos interessados neste produto de alto valor agregado.
ABSTRACT: Research on monocrystalline grade CVD diamond (Chemical
Vapor Deposition) or SCD (Single Crystal Diamond) using microwave
plasma assisted chemical vapor deposition technique (MWPACVD), has
been intensified in the last two decades by the various
applications that this great material provides in the
technological and industrial field. Its application is very broad
ranging from heat sinks, semiconductor, optical windows, and even
as gems for jewelry. These results led to the emergence of several
partnerships between research centers and diamond-producing
companies. One of the objectives of this connections is purpose of
improving the properties of this crystal, open a market window and
create a new product with high added value. There are several
methods of obtaining epitaxial CVD diamond, however, the high
power MWPACVD technique is used for the production of
homoepitaxial diamond. MWPACVD due to the high growth rates and
the better control of diamond imperfections and impurities
comparing to others CVD deposition techniques. In the present
work, a study was developed to search for parameters for the
growth of monocrystalline diamond (SCD) using the high-power via
MWPACVD technique (6 kW), which is unprecedented in Brazil. For
this purpose, a study was made of the reactor operating principle
and determination of the best growth parameters. Was deposited
polycrystalline CVD diamond a film on silicon substrate and at
high power input, above 3 kW. According to the previous was
defined the best parameters to obtain single crystal diamond.
Several techniques of characterization were used to analyze the
obtained film quality, such as Raman Scattering Spectroscopy,
Fourier Transform Infrared Spectroscopy, Scanning Electron
Microscopy, X-ray Diffractometry, Atomic Force Microscopy and
Optical Microscopy with polarized light. The preliminary results
show that the parameters adopted for the production of
polycrystalline diamond have yielded good quality films and with
high growth rates. These results allowed the monocrystalline
research advanced, obtaining a genuinely mono crystalline diamond
film with a single structure [100] direction. Diamond was 1,4 mm
thickness in 62 hours of deposition, evidencing also a great
growth rate, of about 18-24 \μm/h evidenced by the
above-mentioned characterizations. During the development of this
work some defects in diamond structure were observed, and new
studies are suggested for the work continuity. However, owing to
the complexity of this subject, its continuity will be focused on
a doctoral proposal, highlighting the optical and gemstone
applications and already with the interested ones in this product
of high added value.",
committee = "Trava-Airoldi, Vladimir Jesus (presidente/orientador) and Corat,
Evaldo Jos{\'e} and Machado, Jo{\~a}o Paulo Barros and
Salvadori, Maria Cec{\'{\i}}lia Barbosa da Silveira",
englishtitle = "Study of the growth enviroment of monocrystalline diamond films by
MWPACVD",
language = "pt",
pages = "128",
ibi = "8JMKD3MGP3W34R/3T772C8",
url = "http://urlib.net/ibi/8JMKD3MGP3W34R/3T772C8",
targetfile = "publicacao.pdf",
urlaccessdate = "20 abr. 2024"
}