@Article{MartinsDamCorTraBar:2021:MiReSt,
author = "Martins, R{\^o}mulo Lu{\'{\i}}s and Damm, Djoille Denner and
Corat, Evaldo Jos{\'e} and Trava-Airoldi, Vladimir Jesus and
Barquete, Danilo Maciel",
affiliation = "{Universidade Estadual de Santa Cruz (UESC)} and {Universidade
Federal do Rec{\^o}ncavo Baiano} and {Instituto Nacional de
Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas
Espaciais (INPE)} and {Universidade Estadual de Santa Cruz
(UESC)}",
title = "Mitigating residual stress of high temperature CVD diamond films
on vanadium carbide coated steel",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and
Films",
year = "2021",
volume = "39",
number = "1",
pages = "e013404",
abstract = "In this work, a process condition was created to deposit a thin
film of diamond on AISI O1 steel in a hot filament chemical vapor
deposition (CVD) reactor. The main drawbacks to overcome are the
diamond film high residual stresses caused by the difference
between the coefficient of thermal expansion (CTE) of steel
(\∼12 × 10\−6 K\−1 ) and diamond (0.8 ×
10\−6 K\−1 ). Our group proposed a diffusion
vanadium carbide (VC) interlayer as a potential solution to
mitigate carbon dissolution in the substrate and graphite
formation instead of diamond; however, the intermediate CTE of VC
still provides high thermal stress and delamination of the film. A
solution was proposed by performing the diamond CVD on the AISI O1
steel substrate above the steel austenitizing temperature, under
the prospect that thermal stress will be minimized during cooling,
since the return of steel from faced-centered cubic to
body-centered cubic crystalline structures will cause substrate
expansion. The lower residual stress was accomplished by the
diamond growth temperature of 840 °C with all the steel substrate
above the austenitizing critical temperature. The residual stress
mitigation was 3.9 GPa, merging VC interlayer and high growth
temperature, where numerical simulation exposed the same stress
created by the growth temperature at 545 °C.",
doi = "10.1116/6.0000607",
url = "http://dx.doi.org/10.1116/6.0000607",
issn = "0734-2101",
language = "en",
targetfile = "martins_mitigating.pdf",
urlaccessdate = "13 maio 2024"
}