@Article{MitmaPillacaCoMaFeSiRoTr:2024:PrBoDi,
               author = "Mitma Pillaca, Elver Juan de Dios and Correia, Rebeca Falc{\~a}o 
                         Borja de Oliveira and Martins, Gislene Valdete and Ferreira, Saulo 
                         Ribeiro and Silva, Tiago Fiorini da and Rodrigues, Cleber Lima and 
                         Trava Airoldi, Vladimir Jesus",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto 
                         Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de 
                         Pesquisas Espaciais (INPE)} and {Universidade Federal de S{\~a}o 
                         Paulo (UNIFESP)} and {Universidade de S{\~a}o Paulo (USP)} and 
                         {Universidade de S{\~a}o Paulo (USP)} and {Instituto Nacional de 
                         Pesquisas Espaciais (INPE)}",
                title = "Preparation of boron-doped diamond-like carbon films via 
                         enhanced-PECVD using an additional cathode",
              journal = "Surface and Coatings Technology",
                 year = "2024",
               volume = "478",
                pages = "e130432",
                month = "Feb.",
             keywords = "Additional cathode, B:DLC, Boron doped DLC films, Bubbler, 
                         Modified PECVD, Tribological coatings, Trimethylborate.",
             abstract = "Boron-doped Diamond-Like Carbon (B:DLC) films with different 
                         concentrations of boron were produced in an Enhanced-PECVD reactor 
                         using trimethylborate (TMB) vapor as the boron source. An 
                         additional cathode system was incorporated inside the reactor to 
                         confine the plasma to grow B:DLC film on polished Ti-6Al-4 V and 
                         Silicon samples. The boron-containing coatings were evaluated and 
                         compared to a boron-free coating through several characterization 
                         techniques. Raman spectroscopy, Nano-hardness, XPS, RBS, and SEM 
                         techniques were employed to study the microstructure, hardness, 
                         chemical composition and bonding state, and morphology of the 
                         samples. Ball-on-disc tests were also conducted, using a 
                         tribometer to measure the friction coefficient and wear 
                         resistance. Boron was confirmed in the DLC film structure by XPS 
                         and RBS analyses. The XPS measurements showed that the boron 
                         bonding was accompanied by a higher content oxygen than carbon 
                         content, which increased with the TMB concentration. The sp3 
                         content was evaluated, and the result showed a decrease of about 
                         30 % with the higher solution concentration. As a consequence, the 
                         friction coefficient, wear, and hardness were affected. However, 
                         the adherence of the films was not compromised. Finally, our study 
                         indicated that the PECVD deposition system employing an additional 
                         cathode was suitable for the incorporation of boron into DLC 
                         films.",
                  doi = "10.1016/j.surfcoat.2024.130432",
                  url = "http://dx.doi.org/10.1016/j.surfcoat.2024.130432",
                 issn = "0257-8972",
             language = "en",
           targetfile = "1-s2.0-S0257897224000628-main.pdf",
        urlaccessdate = "27 abr. 2024"
}