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		<doi>10.1590/1980-5373-MR-2019-0277</doi>
		<issn>1516-1439</issn>
		<label>lattes: 7698697775899601 1 OliveiraAASMFLBS:2019:SuTrNi</label>
		<citationkey>OliveiraAASMFLSBS:2019:SuTrNi</citationkey>
		<title>The surface treatment of niobium superconducting reentrant cavities by means of high temperature nitrogen plasma based ion implantation</title>
		<year>2019</year>
		<typeofwork>journal article</typeofwork>
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		<author>Oliveira, Rogério de Moraes,</author>
		<author>Aguiar, Odylio Denys de,</author>
		<author>Araújo, Michel Felipe Lima de Araújo,</author>
		<author>Silva, Matheus Moraes Novaes Ferreira da,</author>
		<author>Mello, Carina Barros,</author>
		<author>Ferreira, Elvis Camilo,</author>
		<author>Liccardo, Vincenzo,</author>
		<author>Savonov, Graziela da Silva,</author>
		<author>Baba, Koumei,</author>
		<author>Souza, Renata Lopes Gonçalves de,</author>
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		<group>CMS-ETES-SESPG-INPE-MCTIC-GOV-BR</group>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<affiliation>Instituto Tecnológico de Aeronáutica (ITA)</affiliation>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<affiliation>Sanno Co Ltda</affiliation>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<electronicmailaddress></electronicmailaddress>
		<electronicmailaddress>odylio.aguiar@inpe.br</electronicmailaddress>
		<electronicmailaddress></electronicmailaddress>
		<electronicmailaddress>matheus.novaes@inpe.br</electronicmailaddress>
		<electronicmailaddress>carina.mello@inpe.br</electronicmailaddress>
		<electronicmailaddress></electronicmailaddress>
		<electronicmailaddress></electronicmailaddress>
		<electronicmailaddress>graziela.savonov@inpe.br</electronicmailaddress>
		<journal>Materials Research-Ibero-american Journal of Materials</journal>
		<volume>22</volume>
		<number>6</number>
		<pages>e20190277</pages>
		<secondarymark>A2_ENGENHARIAS_II B1_MATERIAIS B1_INTERDISCIPLINAR B1_ENGENHARIAS_III B1_ENGENHARIAS_I B1_CIÊNCIAS_AGRÁRIAS_I B2_MEDICINA_VETERINÁRIA B2_GEOCIÊNCIAS B2_ENGENHARIAS_IV B2_ARQUITETURA_E_URBANISMO B3_ODONTOLOGIA B3_MEDICINA_III B3_MEDICINA_II B3_MEDICINA_I B3_MATEMÁTICA_/_PROBABILIDADE_E_ESTATÍSTICA B3_FARMÁCIA B3_CIÊNCIA_DE_ALIMENTOS B3_ANTROPOLOGIA_/_ARQUEOLOGIA B4_BIOTECNOLOGIA B5_QUÍMICA B5_CIÊNCIAS_BIOLÓGICAS_III B5_CIÊNCIAS_BIOLÓGICAS_II B5_ASTRONOMIA_/_FÍSICA</secondarymark>
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		<keywords>Niobium, superconducting resonant cavities, plasma ion implantation, gravitational wave detector.</keywords>
		<abstract>High Temperature Nitrogen Plasma Based Ion Implantation (HT-NPBII) has been used to treat the surface of niobium superconducting reentrant cavities, which are part of parametric transducers in a resonant-mass gravitational wave detector. The aim is to enhance the corresponding electrical quality factors (Q-factors) which are closely related with the increase of the sensitivity of the system. In this experiment, the cavities are immersed in plasma and bombarded by energetic nitrogen ions, which are implanted into the surfaces of these heated substrates. The heating temperature of the cavities is controlled during the treatment and its level directly affects the N implantation depth profile due to the diffusion process. Additional tailoring of the nitrogen doping can be performed by the adjustment of the intensity and the duty cycle of the high negative voltage pulses used for ion implantation. For implantations performed at 5 kV /20 &#956;s /300 Hz/ 700 °C, nitrogen atoms occupy interstitial spaces in the crystal lattice of niobium. The treatment of niobium superconducting cavities under these parameters caused the enhancement of two orders of magnitude of respective Q-factors. A set of characterization techniques was performed herein in order to help with the understanding of the underlying mechanism behind this phenomenon.</abstract>
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