@InCollection{SantosBarbCoraUeda:2021:FoMeNa,
               author = "Santos, Nazir Monteiro dos and Barbosa, Divani Carvalho and Corat, 
                         Evaldo Jos{\'e} and Ueda, Mario",
                title = "Formation of metal nanoparticles by sputter deposition on UNCD 
                         films by NPIII inside conductive tubes",
            booktitle = "The Great World of Nanotechnology Vol II",
            publisher = "Editora Artemis",
                 year = "2021",
               editor = "Nobre, M. A. L.",
                pages = "109--124",
             keywords = "Plasma Immersion Ion Implantation. Surface Modification., 
                         Ultrananocrystalline Diamond Films. Conductive tubes.",
             abstract = "Surface modification of ultrananocrystalline diamond (UNCD) films 
                         by Nitrogen Plasma Immersion Ion Implantation (NPIII) using 
                         conductive tubes was studied. UNCD films were deposited on 
                         titanium substrates by CVD process using a hot filament reactor. 
                         The UNCD films were treated by NPIII inside stainless steel 
                         metallic tubes. The tubes, with 150 mm of length and different 
                         diameters, containing the UNCD films were placed in the interior 
                         of vacuum chamber of 600 liters. Field Emission Gun Scanning 
                         Electron Microscopy (FEG-SEM) with Energy Dispersive Spectroscopy 
                         (EDS) auxiliary, X-Ray Diffraction (XRD), Raman Scattering 
                         Spectroscopy (RSS), and X-ray Photoelectron Spectroscopy (XPS) 
                         were used to investigate the effect of NPIII treatment on UNCD 
                         films. The results showed that the NPIII treatment changed the 
                         surface morphology of UNCD films, increased the degree of disorder 
                         and the structural defects, and the formation of metallic 
                         nanoparticles by sputter deposition of the materials from the 
                         conductive tubes. Surface analysis have also demonstrated 
                         substantial dependence of NPIII with the conductive tubes 
                         diameter. For the UNCD film treatment by NPIII inside tube with 
                         diameter of 110 mm (T110), there was formation of metal oxide and 
                         nitride layers on the surface. For the treatment carried out 
                         inside the tube with a diameter of 40 mm (T40), there was 
                         implantation of metallic particles, indicating that the surface of 
                         the UNCD films was completely covered by iron (Feš ).",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Faculdade 
                         Tecnol{\'o}gica (FATEC)} and {Instituto Nacional de Pesquisas 
                         Espaciais (INPE)} and {Instituto Nacional de Pesquisas Espaciais 
                         (INPE)}",
                  doi = "10.37572/EdArt_3006213618",
                  url = "http://dx.doi.org/10.37572/EdArt_3006213618",
                 isbn = "9786587396361",
                label = "lattes: 3956926180174007 2 
                         MonteirodosSantosMitUedDurSan:2021:XRPHSP",
             language = "pt",
           targetfile = "santos_formation.pdf",
                  url = "https://www.editoraartemis.com.br/artigo/32225/",
               volume = "Vol II",
        urlaccessdate = "13 maio 2024"
}