1. Identificação | |
Tipo de Referência | Artigo em Revista Científica (Journal Article) |
Site | mtc-m21b.sid.inpe.br |
Código do Detentor | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
Identificador | 8JMKD3MGP3W34P/3MPQ6QP |
Repositório | sid.inpe.br/mtc-m21b/2016/11.11.16.29 (acesso restrito) |
Última Atualização | 2016:11.11.16.29.27 (UTC) simone |
Repositório de Metadados | sid.inpe.br/mtc-m21b/2016/11.11.16.29.27 |
Última Atualização dos Metadados | 2021:07.28.22.24.01 (UTC) administrator |
DOI | 10.1088/0022-3727/49/37/375301 |
ISSN | 0022-3727 |
Chave de Citação | TestoniCPFMSGVM:2016:InAlPa |
Título | Influence of the Al2O3 partial-monolayer number on the crystallization mechanism of TiO2 in ALD TiO2/Al2O3 nanolaminates and its impact on the material properties |
Ano | 2016 |
Mês | Sept |
Data de Acesso | 29 mar. 2024 |
Tipo de Trabalho | journal article |
Tipo Secundário | PRE PI |
Número de Arquivos | 1 |
Tamanho | 3888 KiB |
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2. Contextualização | |
Autor | 1 Testoni, G. E. 2 Chiappim, W. 3 Pessoa, R. S. 4 Fraga, Mariana Amorim 5 Miyakawa, W. 6 Sakane, K. K. 7 Galvão, N. K. A. M. 8 Vieira, L. 9 Maciel, H. S. |
Grupo | 1 2 3 4 LAS-CTE-INPE-MCTI-GOV-BR |
Afiliação | 1 Universidade do Vale do Paraíba (UNIVAP) 2 Universidade do Vale do Paraíba (UNIVAP) 3 Universidade do Vale do Paraíba (UNIVAP) 4 Instituto Nacional de Pesquisas Espaciais (INPE) 5 Instituto de Estudos Avançados (IEAv) 6 Universidade do Vale do Paraíba (UNIVAP) 7 Instituto Tecnológico de Aeronáutica (ITA) 8 Universidade do Vale do Paraíba (UNIVAP) 9 Universidade do Vale do Paraíba (UNIVAP) |
Endereço de e-Mail do Autor | 1 2 3 rspessoa@univap.br 4 mariana.fraga@inpe.br |
Revista | Journal of Physics D: Applied Physics |
Volume | 49 |
Número | 37 |
Páginas | 375301 |
Histórico (UTC) | 2016-11-11 16:29:27 :: simone -> administrator :: 2016-11-11 16:30:23 :: administrator -> simone :: 2016 2016-11-11 16:31:46 :: simone -> administrator :: 2016 2021-07-28 22:24:01 :: administrator -> simone :: 2016 |
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3. Conteúdo e estrutura | |
É a matriz ou uma cópia? | é a matriz |
Estágio do Conteúdo | concluido |
Transferível | 1 |
Tipo do Conteúdo | External Contribution |
Tipo de Versão | publisher |
Palavras-Chave | nanolaminate titanium dioxide aluminum oxide atomic layer deposition |
Resumo | TiO2/Al2O3 nanolaminates are being investigated to obtain unique materials with chemical, physical, optical, electrical and mechanical properties for a broad range of applications that include electronic and energy storage devices. Here, we discuss the properties of TiO2/Al2O3 nanolaminate structures constructed on silicon (1 0 0) and glass substrates using atomic layer deposition (ALD) by alternatively depositing a TiO2 sublayer and Al2O3 partial-monolayer using TTIP-H2O and TMA-H2O precursors, respectively. The Al2O3 is formed by a single TMA-H2O cycle, so it is a partial-monolayer because of steric hindrance of the precursors, while the TiO2 sublayer is formed by several TTIP-H2O cycles. Overall, each nanolaminate incorporates a certain number of Al2O3 partial-monolayers with this number varying from 10-90 in the TiO2/Al2O3 nanolaminate grown during 2700 total reaction cycles of TiO2 at a temperature of 250 degrees C. The fundamental properties of the TiO2/Al2O3 nanolaminates, namely film thickness, chemical composition, microstructure and morphology were examined in order to better understand the influence of the number of Al2O3 partial-monolayers on the crystallization mechanism of TiO2. In addition, some optical, electrical and mechanical properties were determined and correlated with fundamental characteristics. The results show clearly the effect of Al2O3 partial-monolayers as an internal barrier, which promotes structural inhomogeneity in the film and influences the fundamental properties of the nanolaminate. These properties are correlated with gas phase analysis that evidenced the poisoning effect of trimethylaluminum (TMA) pulse during the TiO2 layer growth, perturbing the growth per cycle and consequently the overall film thickness. It was shown that the changes in the fundamental properties of TiO2/Al2O3 nanolaminates had little influence on optical properties such as band gap and transmittance. However, in contrast, electrical properties as resistivity and mechanical properties as hardness and elastic modulus were shown to be very dependent. From these analyses, several applications could be suggested for different kinds of nanolaminates obtained in this work. |
Área | FISMAT |
Arranjo | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Influence of the... |
Conteúdo da Pasta doc | acessar |
Conteúdo da Pasta source | não têm arquivos |
Conteúdo da Pasta agreement | |
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4. Condições de acesso e uso | |
Idioma | en |
Arquivo Alvo | testoni_influence.pdf |
Grupo de Usuários | simone |
Grupo de Leitores | administrator simone |
Visibilidade | shown |
Permissão de Leitura | deny from all and allow from 150.163 |
Permissão de Atualização | não transferida |
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5. Fontes relacionadas | |
Repositório Espelho | urlib.net/www/2011/03.29.20.55 |
Unidades Imediatamente Superiores | 8JMKD3MGPCW/3ESR3H2 |
Divulgação | WEBSCI; PORTALCAPES; SCOPUS. |
Acervo Hospedeiro | sid.inpe.br/mtc-m21b/2013/09.26.14.25.20 |
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6. Notas | |
Campos Vazios | alternatejournal archivingpolicy archivist callnumber copyholder copyright creatorhistory descriptionlevel e-mailaddress format isbn label lineage mark nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project resumeid rightsholder schedulinginformation secondarydate secondarykey secondarymark session shorttitle sponsor subject tertiarymark tertiarytype url |
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7. Controle da descrição | |
e-Mail (login) | simone |
atualizar | |
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