| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | plutao.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | J8LNKAN8RW/3AFLGS9 |
| Repository | dpi.inpe.br/plutao/2011/09.22.19.47.13 (restricted access) |
| Last Update | 2011:10.20.12.00.36 (UTC) administrator |
| Metadata Repository | dpi.inpe.br/plutao/2011/09.22.19.47.14 |
| Metadata Last Update | 2018:06.05.00.01.30 (UTC) administrator |
| DOI | 10.1088/0268-1242/26/10/105003 |
| ISSN | 0268-1242 |
| Label | lattes: 3801575713681461 6 ZiminGoAmZoAbRa:2011:SpRaOf |
| Citation Key | ZiminGoAmZoRa:2011:SpRaLe |
| Title | Sputtering rates of lead chalcogenide-based ternary solid solutions during inductively coupled argon plasma treatment  |
| Year | 2011 |
| Month | Aug. |
| Access Date | 2024, May 04 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 307 KiB |
| 2. Context | |
| Author | 1 Zimin, S P 2 Gorlachev, E S 3 Amirov, I I 4 Zogg, H 5 Abramof 6 Rappl, Paulo Henrique de Oliveira |
| Resume Identifier | 1 2 3 4 5 6 8JMKD3MGP5W/3C9JJ37 |
| Group | 1 2 3 4 5 LAS-CTE-INPE-MCT-BR 6 LAS-CTE-INPE-MCT-BR |
| Affiliation | 1 Microelectronics Department, Yaroslavl State University, Sovetskaya Street 14, Yaroslavl 150000, Russia 2 Microelectronics Department, Yaroslavl State University, Sovetskaya Street 14, Yaroslavl 150000, Russia 3 Yaroslavl Branch of the Institute of Physics and Technology, Russian Academy of Sciences, Universitetskaya Street 21, Yaroslavl 150007, Russia 4 Thin Film Physics Group, Laboratory for Solid State Physics, Swiss Federal Institute of Technology, ETH Technopark, CH-8005, Zurich, Switzerland 5 Instituto Nacional de Pesquisas Espaciais (INPE) 6 Instituto Nacional de Pesquisas Espaciais (INPE) |
| Author e-Mail Address | 1 2 3 4 5 6 rappl@las.inpe.br |
| e-Mail Address | rappl@las.inpe.br |
| Journal | Semiconductor Science and Technology |
| Volume | 26 |
| Number | 10 |
| Pages | 105003 |
| Secondary Mark | B2_ASTRONOMIA_/_FÍSICA B1_ENGENHARIAS_II A2_ENGENHARIAS_III A1_ENGENHARIAS_IV B2_MATERIAIS |
| History (UTC) | 2011-09-23 14:11:21 :: lattes -> secretaria.cpa@dir.inpe.br :: 2011 2011-10-20 12:01:53 :: secretaria.cpa@dir.inpe.br -> administrator :: 2011 2018-06-05 00:01:30 :: administrator -> marciana :: 2011 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Version Type | publisher |
| Keywords | Processo de Sputtering em calcogenetos de chumbo |
| Abstract | In this work investigations of sputtering of monocrystalline (1 1 1)-oriented epitaxial films of semiconductor ternary solid solutions of Pb1−xSnxTe (x = 0.000.56), Pb1−xEuxTe (x = 0.000.05), Pb1−xSnxSe (x = 0.000.07), Pb1−xEuxSe (x = 0.000.16, x = 1.00), Pb1−xSnxS (x = 0.000.05) on Si(1 1 1) and BaF2(1 1 1) substrates in RF high-density low-pressure inductively coupled argon plasma were carried out. It is determined that sputtering rates for the studied materials retain high values typical for binary solutions PbTe, PbSe, PbS. The results indicate the interrelation of the sputtering rates of ternary compounds and of the sublimation energy of binary compounds that constitute a solid solution. The physical model of this characteristic property of lead chalcogenide-based ternary alloys based on the expansion of a classic Sigmund solid sputtering theory explaining the observed sputtering rate behavior with the alloy composition variation is proposed. |
| Area | FISMAT |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Sputtering rates of... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | 0268-1242_26_10_105003.pdf |
| User Group | administrator lattes secretaria.cpa@dir.inpe.br |
| Visibility | shown |
| Archiving Policy | denypublisher denyfinaldraft12 |
| Read Permission | deny from all and allow from 150.163 |
| Update Permission | not transferred |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 |
| Dissemination | WEBSCI; COMPENDEX. |
| Host Collection | dpi.inpe.br/plutao@80/2008/08.19.15.01 |
| 6. Notes | |
| Notes | Setores de Atividade: Atividades profissionais, científicas e técnicas, Pesquisa e desenvolvimento científico. |
| Empty Fields | alternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel format isbn lineage mark mirrorrepository nextedition orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarykey session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |