| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | marte3.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZ3r59YCT/H3Lni |
| Repository | sid.inpe.br/iris@1905/2005/08.04.03.13 (restricted access) |
| Last Update | 2007:11.19.16.36.12 (UTC) administrator |
| Metadata Repository | sid.inpe.br/iris@1905/2005/08.04.03.13.18 |
| Metadata Last Update | 2018:06.06.03.55.45 (UTC) administrator |
| Secondary Key | INPE-14925-PRE/9838 |
| ISSN | 0963-0252 1361-6595 |
| Label | 10531 |
| Citation Key | TanUDRBAIT:2002:MaPlIm |
| Title | Magnesium plasma immersion ion implantation in a large straight magnetic duct  |
| Year | 2002 |
| Secondary Date | 20021212 |
| Month | Aug. |
| Access Date | 2024, Apr. 28 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 201 KiB |
| 2. Context | |
| Author | 1 Tan, I. H. 2 Ueda, Mario 3 Dallaqua, Renato Sergio 4 Rossi, J. O. 5 Beloto, Antonio Fernando 6 Abramof, Eduardo 7 Inoue, Y. 8 Takai, O. |
| Group | 1 LAP-INPE-MCT-BR 2 LAS-INPE-MCT-BR |
| Journal | Plasma Sources Science and Technology |
| Volume | 11 |
| Number | 3 |
| Pages | 317-323 |
| History (UTC) | 2006-11-14 18:52:47 :: administrator -> jefferson :: 2007-11-19 16:36:13 :: jefferson -> administrator :: 2018-06-06 03:55:45 :: administrator -> marciana :: 2002 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | FISICA E TECNOLOGIA DE MATERIAIS SURFACE MODIFICATION CENTRIFUGE |
| Abstract | Magnesium ions were implanted on silicon wafers using a vacuum arc plasma system with a straight 1m long magnetic duct, 0.22 m in diameter. Good macroparticle filtering was obtained in samples positioned facing the plasma stream and complete filtering was achieved in samples with surfaces parallel to the plasma stream and magnetic field. Deposition is also minimized by placing sample surfaces parallel to the plasma stream. High resolution x-ray diffraction rocking curves of impianted samples show that the changes in lattice constant are due to compressive strain. and the distortion is larger for higher voltages. Without magnetic field the implantation was a few hundred angstroms deep, as expected, but with magnetic field the depth profile was surprisingly extended to over 0.1 mum, a fact for which we do not yet have a convincing explanation, but could be related to radiation enhanced segregation. The presence of a magnetic field increases substantially the retained implantation dose due to the increase in plasma density by two orders of magnitude. |
| Area | FISMAT |
| Arrangement 1 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Magnesium plasma immersion... |
| Arrangement 2 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Magnesium plasma immersion... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Target File | magnesium plasma immersion ion, tan.pdf |
| User Group | administrator jefferson |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | denypublisher denyfinaldraft12 |
| Read Permission | deny from all and allow from 150.163 |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 8JMKD3MGPCW/3ET2RFS |
| Dissemination | WEBSCI; PORTALCAPES. |
| Host Collection | sid.inpe.br/banon/2001/04.03.15.36 |
| 6. Notes | |
| Empty Fields | affiliation alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress electronicmailaddress format isbn language lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup resumeid rightsholder schedulinginformation secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
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