| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZ3r59YDa/FEhyh |
| Repository | sid.inpe.br/iris@1916/2005/04.04.14.42 (restricted access) |
| Last Update | 2005:04.04.03.00.00 (UTC) administrator |
| Metadata Repository | sid.inpe.br/iris@1916/2005/04.04.14.42.07 |
| Metadata Last Update | 2018:06.05.01.28.21 (UTC) administrator |
| Secondary Key | INPE-12292-PRE/7612 |
| ISSN | 0168-583X 0167-5087 |
| Citation Key | AbramofBelGomBerReu:2000:AnXrRo |
| Title | Analysis of X-ray rocking curves in (0 0 1) silicon crystals implanted with nitrogen by plasma immersion ion implantation  |
| Year | 2000 |
| Access Date | 2024, Apr. 27 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 191 KiB |
| 2. Context | |
| Author | 1 Abramof, Eduardo 2 Beloto, Antonio Fernando 3 Gomes, Geraldo F. 4 Berni, Luis Angelo 5 Reuther, H. |
| Resume Identifier | 1 8JMKD3MGP5W/3C9JGUH 2 8JMKD3MGP5W/3C9JGJ8 |
| Group | 1 LAS-INPE-MCT-BR 2 LAP-INPE-MCT-BR |
| Affiliation | 1 Laboratorio Associado de Sensores e Materiais, Instituto Nacional de Pesquisas Espaciais, CP515, 12201-970, S~ao Jose dos Campos 2 Research Center Rossendorf, Institute of Ion Beam Physics and Materials Research, Dresden, Germany |
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Volume | 161 |
| Pages | 1054-1057 |
| History (UTC) | 2006-01-23 09:54:21 :: sergio -> administrator :: 2007-04-04 20:50:36 :: administrator -> sergio :: 2008-01-07 12:52:40 :: sergio -> administrator :: 2018-06-05 01:28:21 :: administrator -> marciana :: 2000 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | High resolution X-ray di€ raction Plasma immersion ion implantation Surface analysis Silicon crystals |
| Abstract | High-resolution X-ray diraction methods have been used to characterize nitrogen-doped silicon obtained by plasma immersion ion implantation (PIII). The Si wafers were implanted with the plasma potential controlled at 70 V, and a plasma density of 1:5 1010 cmÿ3. The high voltage pulser was operated with peak voltage of 10 kV, 6 ls pulse duration and repetition frequency of 20 Hz. Auger electron spectroscopy (AES) measurements were carried out revealing successful implantation of ions with accumulated nitrogen dose of 1:5 1017 cmÿ2. The (0 0 4) Si rocking curve (x-scan) was measured in a high resolution X-ray diractometer equipped with a Ge(2 2 0) four crystal monochromator before and after implantation. A small distortion of the Si(0 0 4)-rocking curve was clearly observed for the as-implanted sample. This rocking curve was simulated by dynamical theory of X-ray diraction, assuming a Gaussian strain distribution through the implanted region and using the data from the nitrogen pro®le obtained from the Auger measurements. With these assumptions, a good agreement between the measured and simulated rocking curves was obtained. Ó 2000 Elsevier Science B.V. All rights reserved. |
| Area | FISMAT |
| Arrangement 1 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Analysis of X-ray... |
| Arrangement 2 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Analysis of X-ray... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | analysis of x-ray.pdf |
| User Group | administrator sergio |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | denypublisher denyfinaldraft24 |
| Read Permission | deny from all and allow from 150.163 |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 8JMKD3MGPCW/3ET2RFS |
| Dissemination | WEBSCI; PORTALCAPES; COMPENDEX. |
| Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository month nextedition notes number orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |