| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZ3r59YDa/FEm5L |
| Repository | sid.inpe.br/iris@1916/2005/04.04.17.25 (restricted access) |
| Last Update | 2005:04.04.03.00.00 (UTC) administrator |
| Metadata Repository | sid.inpe.br/iris@1916/2005/04.04.17.25.05 |
| Metadata Last Update | 2018:06.05.01.20.19 (UTC) administrator |
| Secondary Key | INPE-12294-PRE/7614 |
| ISSN | 0168-583X 0167-5087 |
| Citation Key | AbramofBelUedGünReu:2001:ReSpMa |
| Title | Reciprocal space mapping of silicon implanted with nitrogen by plasma immersion ion implantation  |
| Year | 2001 |
| Month | Apr. |
| Access Date | 2024, Apr. 28 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 113 KiB |
| 2. Context | |
| Author | 1 Abramof, Eduardo 2 Beloto, Antonio Fernando 3 Ueda, Mario 4 Günzel, R. 5 Reuther, H. |
| Resume Identifier | 1 8JMKD3MGP5W/3C9JGUH 2 8JMKD3MGP5W/3C9JGJ8 3 8JMKD3MGP5W/3C9JHSB |
| Group | 1 LAS-INPE-MCT-BR 2 LAP-INPE-MCT-BR |
| Affiliation | 1 Laboratório Associado de Plasma, Instituto Nacional de Pesquisas Espaciais, CP515, 12201-970 São José dos Campos, SP, Brazil 2 Research Center Rossendorf, Institute for Ion Beam Physics and Materials Research, Dresden, Germany |
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |
| Volume | 175-177 |
| Pages | 229-234 |
| History (UTC) | 2005-04-04 17:34:24 :: sergio -> administrator :: 2006-09-28 22:24:08 :: administrator -> sergio :: 2008-01-07 12:52:40 :: sergio -> administrator :: 2018-06-05 01:20:19 :: administrator -> marciana :: 2001 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | Reciprocal space mapping High-resolution X-ray diffraction Plasma immersion ion implantation Silicon crystals |
| Abstract | Nitrogen was implanted in (0 0 1) silicon wafers using 12 kV pulses in a glow-discharge plasma immersion ion implantation (PIII) system and at 35 keV in an electron-cyclotron-resonance (ECR) PIII facility. An implantation depth of 80 nm and a retained dose of approximately 3×1017 cm 2 were found, for both samples, from the nitrogen Auger profiles. Reciprocal space maps (RSMs) around the (0 0 4) and (1 1 3) Si lattice points were measured for the implanted and unimplanted Si wafers, using the high-resolution X-ray diffractometer in the triple axis configuration. An asymmetry in the reciprocal space coordinate Qz (perpendicular to the sample surface) indicates that the implanted atoms force an increase in the Si lattice parameter in this direction. A broadening in the Qx direction (parallel to the sample surface) was also observed, but with a less pronounced effect. For the sample implanted with higher energy, the shape of the map indicates a higher disorder in the crystal structure |
| Area | FISMAT |
| Arrangement 1 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Reciprocal space mapping... |
| Arrangement 2 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Reciprocal space mapping... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | reciprocal.pdf |
| User Group | administrator sergio |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | denypublisher denyfinaldraft24 |
| Read Permission | deny from all and allow from 150.163 |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 8JMKD3MGPCW/3ET2RFS |
| Dissemination | WEBSCI; PORTALCAPES; COMPENDEX. |
| Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes number orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |