| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZ3r59YDa/Gjsj8 |
| Repository | sid.inpe.br/iris@1916/2005/05.31.19.00 (restricted access) |
| Last Update | 2005:05.31.03.00.00 (UTC) administrator |
| Metadata Repository | sid.inpe.br/iris@1916/2005/05.31.19.00.13 |
| Metadata Last Update | 2018:06.05.01.28.24 (UTC) administrator |
| Secondary Key | INPE-12529-PRE/7828 |
| ISSN | 0257-8972 |
| Citation Key | UedaSteSpaBarNon:1999:AcPaPl |
| Title | Active and passive plasma spectroscopy in a plasma immersion ion implantation (PIII) experiment  |
| Year | 1999 |
| Month | Feb. |
| Access Date | 2024, Apr. 27 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 144 KiB |
| 2. Context | |
| Author | 1 Ueda, Mario 2 Stellati, C. 3 Spassov, V. A. 4 Barroso, Joaquim José 5 Nono, Maria do Carmo de Andrade |
| Resume Identifier | 1 8JMKD3MGP5W/3C9JHSB 2 3 4 5 8JMKD3MGP5W/3C9JHRC |
| Group | 1 LAP-INPE-MCT-BR 2 LAS-INPE-MCT-BR |
| Affiliation | 1 Inst Nacl Pesquisas Espaciais INPE 2 Inst Aeronaut Technol, Sao Jose Dos Campos, SP Brazil 3 Univ Sofia, Fac Phys, Sofia, BU-1126 Bulgaria |
| Journal | Surface and Coatings Technology |
| Volume | 112 |
| Number | 1-3 |
| Pages | 310-313 |
| History (UTC) | 2005-05-31 19:00:13 :: sergio -> administrator :: 2007-04-04 23:59:40 :: administrator -> sergio :: 2008-01-07 12:49:48 :: sergio -> administrator :: 2008-06-10 22:03:31 :: administrator -> banon :: 2010-05-12 14:16:04 :: banon -> administrator :: 2018-06-05 01:28:24 :: administrator -> marciana :: 1999 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | active and passive spectroscopy plasma diagnostics plasma immersion ion implantation surface modification |
| Abstract | Plasma immersion ion implantation (PIII) is an emerging surface modification technique that can be used for three-dimensional ion implantation of non-planar components at low cost compared with the traditional line-of-sight implantation method using accelerators. We have developed a PIII system based on 2.45 GHz microwave-generated plasmas with densities of 10(16)-10(17) m(-3) and temperatures of few eV which allow high-ion-flux implantation in components of complex shape. These plasma parameters are also adequate for diagnostics using passive and active spectroscopic methods even in the presence of high voltages applied to the samples. The principles of active plasma spectroscopy (beam emission spectroscopy) for microwave PIII plasmas and its present status in our laboratory, as well as preliminary passive spectroscopy results, are described. Furthermore, results on the characterization of some irradiated samples and optimization of our PIII device are also presented. (C) 1999 Elsevier Science S.A. All rights reserved. |
| Area | FISMAT |
| Arrangement 1 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Active and passive... |
| Arrangement 2 | urlib.net > LABAP > Active and passive... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | English |
| Target File | Active and passive plasma.pdf |
| User Group | administrator banon sergio |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | denypublisher denyfinaldraft24 |
| Read Permission | deny from all and allow from 150.163 |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 8JMKD3MGPCW/3ET2RFS |
| Dissemination | WEBSCI; PORTALCAPES. |
| Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |