| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZ3r59YDa/Knec2 |
| Repository | sid.inpe.br/iris@1916/2006/03.06.12.13 (restricted access) |
| Last Update | 2006:03.06.12.13.00 (UTC) administrator |
| Metadata Repository | sid.inpe.br/iris@1916/2006/03.06.12.13.04 |
| Metadata Last Update | 2018:06.05.01.20.24 (UTC) administrator |
| Secondary Key | INPE-13569-PRE/8779 |
| ISSN | 0257-8972 |
| Citation Key | UedaBeRoBaGoBeAb:2001:PlImIo |
| Title | Plasma immersion ion implantation experiments at the Instituto Nacional de Pesquisas Espaciais  |
| Year | 2001 |
| Month | Feb |
| Access Date | 2024, Apr. 27 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 191 KiB |
| 2. Context | |
| Author | 1 Ueda, Mario 2 Berni, Luis Angelo 3 Rossi, José Osvaldo 4 Barroso, Joaquim Jose 5 Gomes, Geraldo Francisco 6 Beloto, Antonio Fernando 7 Abramof, Eduardo |
| Resume Identifier | 1 8JMKD3MGP5W/3C9JHSB 2 3 8JMKD3MGP5W/3C9JHJ5 4 5 8JMKD3MGP5W/3C9JH5D 6 8JMKD3MGP5W/3C9JGJ8 7 8JMKD3MGP5W/3C9JGUH |
| Group | 1 LAP-INPE-MCT-BR 2 LCP-INPE-MCT-BR 3 LAS-INPE-MCT-BR |
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais, Laboratório Associado de Plasmas, (INPE, LAP) |
| Journal | Surface and Coatings Technology |
| Volume | 136 |
| Number | 1-3 |
| Pages | 28-31 |
| History (UTC) | 2006-03-06 12:13:05 :: vinicius -> administrator :: 2008-06-10 22:25:26 :: administrator -> vinicius :: 2011-05-21 09:20:06 :: vinicius -> administrator :: 2018-06-05 01:20:24 :: administrator -> marciana :: 2001 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | plasma immersion ion implantation surface modification silicon nitride iron nitride high voltage pulse generators / HIGH-VOLTAGE NITROGEN SILICON |
| Abstract | Historical perspective of the development of PIII devices at the Institute Nacional de Pesquisas Espaciais (INPE) is given, together with the description of the present system under operation and our overall results on this three-dimensional implantation research. Starting with an ignitron switched pulser (1 pulse per 3 min) and an intermittent microwave plasma, we improved our PIII system developing a pulse forming network (PFN) based pulser (20 Hz), 2 years later. We also improved our plasma source towards a DC, highly stable, medium density glow discharge system. A much faster hard tube pulser was recently incorporated to our PIII system (670 Hz) allowing us to achieve good implantation results in different materials. Presently, we are testing a recently purchased RUP-4 commercial pulser to obtain are prevented, 1.1 kHz, square pulses for new experiments in this active field of PIII research. (C) 2001 Elsevier Science B.V. AU rights reserved. |
| Area | FISPLASMA |
| Arrangement 1 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Plasma immersion ion... |
| Arrangement 2 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Plasma immersion ion... |
| Arrangement 3 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABCP > Plasma immersion ion... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | 50.pdf |
| User Group | administrator vinicius |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | denypublisher denyfinaldraft24 |
| Read Permission | deny from all and allow from 150.163 |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 8JMKD3MGPCW/3ET2RFS 8JMKD3MGPCW/3ET38CH |
| Dissemination | WEBSCI; PORTALCAPES. |
| Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |