| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZsFDuKxG/CthLS |
| Repository | sid.inpe.br/marciana/2004/06.15.16.35 (restricted access) |
| Last Update | 2007:11.19.12.35.50 (UTC) administrator |
| Metadata Repository | sid.inpe.br/marciana/2004/06.15.16.35.51 |
| Metadata Last Update | 2018:06.05.01.28.40 (UTC) administrator |
| Secondary Key | INPE-14921-PRE/9834 |
| ISSN | 0169-4332 |
| Citation Key | BaranauskasPeLiDoCo:1994:MoStLa |
| Title | Morphological studies of laser etching processes in self sustained CVD diamond wafers  |
| Year | 1994 |
| Month | may |
| Access Date | 2024, Apr. 28 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 237 KiB |
| 2. Context | |
| Author | 1 Baranauskas, V. 2 Peledb, A. 3 Trava-Airoldic 4 Limad, C. A. S. 5 Doia, I. 6 Coratc, E. J. |
| Group | 1 LAS-INPE-MCT-BR |
| Affiliation | 1 Electrical Engineering Faculty, Department of Semiconductors and Photonics, State University of Campinas, P.O. Box 6101, Campinas 13081-970-SP, Brazil |
| Journal | Applied Surface Science |
| Volume | 80 |
| Pages | 129-135 |
| History (UTC) | 2006-09-28 22:36:01 :: administrator -> marciana :: 2007-11-19 12:35:51 :: marciana -> administrator :: 2018-06-05 01:28:40 :: administrator -> marciana :: 1994 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | CHEMICAL VAPOR-DEPOSITION FILMS GROWTH |
| Abstract | This study reports the first results obtained by cutting/etching high quality synthesized diamond wafers of thickness up to 525 m using a Nd: YAG laser. Energy pulses of 1â5 mJ, repetition rates of 100â50000 Hz and pulse width of 250 ns have been used. The diamond wafers/films were synthesized by CVD of carbon from a diluted methane/freon gas mixture in hydrogen using a hot-filament reactor. It was found that the laser-material cutting/etching mechanisms involve first the graphitization of the grains and then oxidation in air. SEM microscopy was used to observe the surface morphology of the laser cuts revealing a columnar CVD grain growth which is very useful for heat dissipation elements in electro-optical devices. It was found that for deep grooves the cutting width is limited by the grain size of the polycrystalline wafers/films. High profile cutting aspect ratios of the order of 7â12 were obtained. Specific cutting energies employed were of the order of 200 kJ/g. |
| Area | FISMAT |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Morphological studies of... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | morphological studies of laser etching processes, baranauskas.pdf |
| User Group | administrator marciana |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | denypublisher denyfinaldraft24 |
| Read Permission | deny from all and allow from 150.163 |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 |
| Dissemination | WEBSCI; PORTALCAPES; COMPENDEX. |
| Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes number orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup resumeid rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |