| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZsFDuKxG/CxdNd |
| Repository | sid.inpe.br/marciana/2004/06.22.10.54 (restricted access) |
| Last Update | 2008:02.19.11.54.24 (UTC) administrator |
| Metadata Repository | sid.inpe.br/marciana/2004/06.22.10.54.02 |
| Metadata Last Update | 2018:06.05.01.20.53 (UTC) administrator |
| Secondary Key | INPE-10740-PRE/6199 |
| DOI | 10.1016/S0925-9635(01)00468-X |
| ISBN/ISSN | 0925-9635 |
| ISSN | 0925-9635 |
| Citation Key | SilvaCoraSilv:2001:InCFAd |
| Title | Influence of CF4 addition for HFCVD diamond growth on silicon nitride substrates  |
| Project | DIMARE: Diamante e materiais relacionados |
| Year | 2001 |
| Month | Nov. |
| Access Date | 2024, Apr. 27 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 1794 KiB |
| 2. Context | |
| Author | 1 Silva, V. A. 2 Corat, Evaldo José 3 Silva, C. R. M. |
| Resume Identifier | 1 2 8JMKD3MGP5W/3C9JH33 |
| Group | 1 2 LAS-INPE-MCT-BR |
| Affiliation | 1 Universidade de Aveiro, Department of Ceramic and Glass Engineering, Campus Universitário Santiago (UA.UIMC) 2 Instituto Nacional de Pesquisas Espaciais, Laboratório Associado de Sensores e Materiais (INPE.LAS) 3 Centro Tecnico da Aeronautica (CTA.IAE.AMR) |
| Journal | Diamond and Related Materials |
| Volume | 10 |
| Number | 11 |
| Pages | 2002-2009 |
| History (UTC) | 2006-09-28 22:25:42 :: administrator -> marciana :: 2008-02-19 11:54:24 :: marciana -> administrator :: 2018-06-05 01:20:53 :: administrator -> marciana :: 2001 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | MATERIALS PHYSICS Diamond films Sintering Silicon nitride Halogen Intergranular phases FÍSICA DE MATERIAIS Filmes de diamante Nitrato de silicone Halogêneo Fase intergranular |
| Abstract | This work presents a study of CVD diamond growth on silicon nitride-based ceramics with the addition of carbon tetrafluoride (CF4) in a hot filament-assisted reactor (HFCVD). Silicon nitride substrates were hot pressed under a nitrogen atmosphere for 90 min at 1750 degreesC, giving specimens of very high density and good mechanical properties. The CF4 addition is known to bring several advantages to diamond growth and, in particular, in this work, an important interaction of the CF4-containing gas phase with the silicon nitride (Si3N4) substrates has been proven to be very beneficial for nucleation, growth and adherence of the diamond films. A basic gas mixture of H-2/1.5 vol.% CH4/0.5 vol.% CF4 was used in the growth experiments. The nucleation study reveals a strong interaction of the halogen-containing gas phase with the vitreous phase on the substrate surface. A strong erosion of the surface has been observed, which induced a high nucleation density (N-d) of the order of 10(8) particles cm(-2), without any surface pre-treatment. Silicon nitride surface analysis was performed with Raman and infrared specular reflectance spectroscopy. Results suggest the erosion of the vitreous phase, mainly the silica (SiO2) component, and the formation of silicon carbide, prior to diamond growth. Raman spectra and scanning electron microscopy (SEM) show better quality film grown with CF4 addition. Indentation tests with a Rockwell C tip, at variable charge, show a better film adherence if grown with CF4 addition. |
| Area | FISMAT |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Influence of CF4... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | influence.pdf |
| User Group | administrator marciana |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | denypublisher denyfinaldraft24 |
| Read Permission | deny from all and allow from 150.163 |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 |
| Dissemination | WEBSCI; PORTALCAPES; COMPENDEX. |
| Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
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