| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZsFDuKxG/Cykni |
| Repository | sid.inpe.br/marciana/2004/06.24.09.21 (restricted access) |
| Last Update | 2005:02.14.02.00.00 (UTC) administrator |
| Metadata Repository | sid.inpe.br/marciana/2004/06.24.09.21.38 |
| Metadata Last Update | 2018:06.05.01.20.53 (UTC) administrator |
| Secondary Key | INPE-10748-PRE/6206 |
| ISBN/ISSN | 0925-9635 |
| ISSN | 0925-9635 |
| Citation Key | FerreiraAbrCorLeiVJ:2001:StStHF |
| Title | Stress study of HFCVD boron-doped diamond films by X-ray diffraction measurements  |
| Year | 2001 |
| Month | march-july |
| Access Date | 2024, Apr. 28 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 261 KiB |
| 2. Context | |
| Author | 1 Ferreira, Neidenei Gomes 2 Abramof, Eduardo 3 Corat, Evaldo Jose 4 Leite, Nelia Ferreira 5 VJ, Trava-Airoldi |
| Resume Identifier | 1 8JMKD3MGP5W/3C9JHU3 2 8JMKD3MGP5W/3C9JGUH 3 8JMKD3MGP5W/3C9JH33 4 8JMKD3MGP5W/3C9JHU5 |
| Group | 1 LAS-INPE-MCT-BR |
| Journal | Diamond and Related Materials |
| Volume | 10 |
| Number | 3-7 |
| Pages | 750-754 |
| History (UTC) | 2005-02-14 13:36:51 :: sergio -> administrator :: 2006-09-28 22:25:50 :: administrator -> sergio :: 2008-01-07 12:53:20 :: sergio -> administrator :: 2018-06-05 01:20:53 :: administrator -> marciana :: 2001 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | diamond boron doping stress X-ray diffraction |
| Abstract | Stress analysis on chemical vapor deposition (CVD) diamond films has demonstrated an apparent disagreement among various researchers in recent works even for similar deposition conditions. The type and the value of stress have shown a strong dependence on film thickness, which can be attributed to columnar growth and grain size and boundaries. X-Ray diffraction techniques appeared to be more suitable to study these effects and permit the evaluation of the average stress in larger sample areas when compared with micro-Raman spectroscopy, which feels a local strain inside the grains. In the case of boron-doped diamond films, boron incorporation on substitucional or interstitial sites can produce stresses according to the doping level. In order to investigate these effects, a series of diamond films were deposited on silicon (001) substrate in a hot filament (HF)-assisted CVD reactor at 800 degreesC. The CH4 flow is kept at 0.5 seem for all experiments and the H-2 and B2O3/CH3OH/H-2 flows are controlled in order to obtain the desired B/C ratios. Stress behavior in HFCVD boron-doped diamond films has been investigated by X-ray diffraction measurements using the sin(2) psi technique. Tensile and compressive stresses have been observed and the thermal and intrinsic components have been calculated. The diamond films were characterized by scanning electron microscopy and Raman spectroscopy. (C) 2001 Elsevier Science B.V. Pdl rights reserved. |
| Area | FISMAT |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Stress study of... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | stress corat.pdf |
| User Group | administrator |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | denypublisher denyfinaldraft24 |
| Read Permission | deny from all and allow from 150.163 |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 |
| Dissemination | WEBSCI; PORTALCAPES; COMPENDEX. |
| Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notes | |
| Empty Fields | affiliation alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
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