| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZsFDuKxG/CAEUR |
| Repository | sid.inpe.br/marciana/2004/06.28.11.21 (restricted access) |
| Last Update | 2005:06.01.03.00.00 (UTC) administrator |
| Metadata Repository | sid.inpe.br/marciana/2004/06.28.11.21.26 |
| Metadata Last Update | 2018:06.05.01.28.41 (UTC) administrator |
| Secondary Key | INPE-10769-PRE/6227 |
| ISBN/ISSN | 022-2461 |
| ISSN | 0022-2461 1573-4803 |
| Citation Key | CoratTraLeiNonBar:1997:DiGrCF |
| Title | Diamond growth with CF4 addition in hot-filament chemical vapour deposition  |
| Year | 1997 |
| Month | feb. |
| Access Date | 2024, Apr. 28 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 402 KiB |
| 2. Context | |
| Author | 1 Corat, Evaldo Jose 2 Trava-Airoldi, Vladimir Jesus 3 Leite, Nelia Ferreira 4 Nono, Maria do Carmo de Andrade 5 Baranauskas, V. |
| Resume Identifier | 1 8JMKD3MGP5W/3C9JH33 2 3 8JMKD3MGP5W/3C9JHU5 4 8JMKD3MGP5W/3C9JHRC |
| Group | 1 LAS-INPE-MCT-BR |
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais - LAS 2 Univ. Estadual Campinas,Fac Elect Engn. |
| Journal | Journal of Materials Science |
| Volume | 32 |
| Number | 4 |
| Pages | 941-947 |
| History (UTC) | 2005-06-01 11:20:37 :: sergio -> administrator :: 2006-09-28 22:36:07 :: administrator -> sergio :: 2008-01-07 12:49:53 :: sergio -> administrator :: 2018-06-05 01:28:41 :: administrator -> marciana :: 1997 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | Microwave-Plasma Metastable Growth Gas-Phase Temperature Reactor Cvd Tungsten Surfaces Films |
| Abstract | Tetrafluoromethane (CF4) was added to standard CH4/H-2 mixtures for diamond growth in hot-filament-assisted chemical vapour deposition. CF4 concentrations in the range of 0.3%-3% were studied. Mass spectrometry of the exhaust gas showed that only a small fraction (<15%) of CF4 was thermally dissociated for filament temperatures over 1800 degrees C. The observed stable products of its dissociation were mainly C2H2, CH4 and HF. This CF4 addition considerably enhanced the nucleation and growth characteristics on silicon and molybdenum. Diamond growth was observed with substrate temperature as low as 390 degrees C. A comparative study for the growth dependence on substrate temperature with and without CF4 addition in the gas mixture is presented. The growth rate was measured by post-growth weighing with a micro balance. An activation energy of 11 kcal mol(-1) for growth with CF4 addition was obtained. Raman spectra and atomic force microscopy were used to characterize the diamond films. |
| Area | FISMAT |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Diamond growth with... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | Diamond growth with CF4.pdf |
| User Group | administrator |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | denypublisher denyfinaldraft12 |
| Read Permission | deny from all and allow from 150.163 |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 |
| Dissemination | WEBSCI; PORTALCAPES. |
| Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
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