| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZGivnJVY/Li3df |
| Repository | sid.inpe.br/mtc-m16@80/2006/05.29.14.02 (restricted access) |
| Last Update | 2006:05.29.14.02.26 (UTC) administrator |
| Metadata Repository | sid.inpe.br/mtc-m16@80/2006/05.29.14.02.27 |
| Metadata Last Update | 2018:06.05.01.28.59 (UTC) administrator |
| Secondary Key | INPE-13758-PRE/8947 |
| ISSN | 1434-6060 |
| Citation Key | BerniUedGomBelReu:2000:ExReGl |
| Title | Experimental results of a dc glow discharge source with controlled plasma floating potential for plasma immersion ion implantation  |
| Project | Implantação Iônica por Imersão em Plasma (IIIP) |
| Year | 2000 |
| Access Date | 2024, Apr. 27 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 80 KiB |
| 2. Context | |
| Author | 1 Berni, Luis Angelo 2 Ueda, Mario 3 Gomes, G. F. 4 Beloto, Antonio Fernando 5 Reuther, H. |
| Resume Identifier | 1 2 8JMKD3MGP5W/3C9JHSB 3 4 8JMKD3MGP5W/3C9JGJ8 |
| Group | 1 LAP-INPE-MCT-BR 2 LAP-INPE-MCT-BR 3 LAP-INPE-MCT-BR 4 LAS-INPE-MCT-BR |
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Instituto Nacional de Pesquisas Espaciais (INPE) 5 Research Center Rossendorf, Institute of Ion Beam Physics and Materials Research |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 33 |
| Pages | 1592-1595 |
| History (UTC) | 2006-05-29 14:02:27 :: vinicius -> administrator :: 2009-08-12 00:26:13 :: administrator -> vinicius :: 2010-02-01 12:02:22 :: vinicius -> administrator :: 2018-06-05 01:28:59 :: administrator -> marciana :: 2000 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | Glow discharges plasma immersion ion implantation |
| Abstract | A simple dc glow discharge with controlled plasma floating potential was applied as a novel source for plasma immersion ion implantation with excellent results. The glow discharge source is normally used for the conditioning of fusion device chambers, taking advantage of the available high accelerating potential which is necessary for the ion bombardment of the walls. Combining an electron-emitting hot filament with this source, it was possible to get a stable discharge at pressures as low as 8 × 10−4 mbar and, operating it with potentials lower then 70 V, it was possible to reduce the Si sample etching down to zero from 2500 Å seen at potentials of native 350 V, when exposure times of 750 min were used in the samples surface subjected to plasma ion implantation of nitrogen. As a result, retained ion doses of 1.5 1017 cm−2 were obtained in etching-free Si surfaces. |
| Area | FISPLASMA |
| Arrangement 1 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Experimental results of... |
| Arrangement 2 | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Experimental results of... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | berni-experimental.pdf |
| User Group | administrator vinicius |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | denypublisher denyfinaldraft12 |
| Read Permission | deny from all and allow from 150.163 |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 8JMKD3MGPCW/3ET2RFS |
| Dissemination | WEBSCI; PORTALCAPES. |
| Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository month nextedition notes number orcid parameterlist parentrepositories previousedition previouslowerunit progress readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |