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1. Identity statement
Reference TypeJournal Article
Sitemtc-m16.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier6qtX3pFwXQZGivnJVY/LTUCA
Repositorysid.inpe.br/mtc-m16@80/2006/07.28.19.28   (restricted access)
Last Update2006:07.28.19.28.45 (UTC) administrator
Metadata Repositorysid.inpe.br/mtc-m16@80/2006/07.28.19.28.46
Metadata Last Update2018:06.05.01.16.53 (UTC) administrator
Secondary KeyINPE-13915--PRE/9095
ISSN0103-9733
Citation KeyBarbosaNovaBald:2006:NuSiHF
TitleNumerical simulation of HFCVD process used for diamond growth
Year2006
MonthJune
Access Date2024, Apr. 27
Secondary TypePRE PN
Number of Files1
Size430 KiB
2. Context
Author1 Barbosa, Divani C.
2 Nova, Helcio F. V.
3 Baldan, Maurício Ribeiro
Resume Identifier1
2
3 8JMKD3MGP5W/3C9JHTA
Group1 LAS-INPE-MCT-BR
2 LAC-INPE-MCT-BR
3 LAS-INPE-MCT-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais, Laboratório Associado de Sensores e Materiais (INPE.LAS)
2 Instituto Nacional de Pesquisas Espaciais, Laboratório Associado de Computação e Matemática Aplicada (INPE.LAC)
3 Instituto Nacional de Pesquisas Espaciais, Laboratório Associado de Sensores e Materiais (INPE.LAS)
JournalBrazilian Journal of Physics
Volume36
Number2
Pages313-316
History (UTC)2006-07-28 19:28:46 :: simone -> administrator ::
2009-08-12 01:01:50 :: administrator -> simone ::
2011-05-21 20:36:08 :: simone -> administrator ::
2018-06-05 01:16:53 :: administrator -> marciana :: 2006
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
KeywordsNumerical simulation
Diamond growth
Hot-filament chemical vapour deposition
AbstractHot-filament chemical vapour deposition (HFCVD) is a common method employed for diamond deposition. Typically in this method a dilute mixture of carbon containing gas such as methane in hydrogen is thermally activated at sub atmospheric pressures by a hot filament. Due to the filament-substrate proximity, large temperature variation across the substrate is possible. In this work we investigate the role of fluid flow and heat transfer from the filament to substrate in determining the quality of diamond growth. The commercial software CFX was used to calculate velocity field, temperature distribution and fluid flow. A vortex was identified on the substrate.
AreaFISMAT
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4. Conditions of access and use
Languageen
Target FileNumerical simulation of hfcvd process.pdf
User Groupadministrator
simone
Visibilityshown
Copy HolderSID/SCD
Archiving Policydenypublisher denyfinaldraft12
Read Permissiondeny from all and allow from 150.163
5. Allied materials
Next Higher Units8JMKD3MGPCW/3ESGTTP
8JMKD3MGPCW/3ESR3H2
DisseminationWEBSCI; PORTALCAPES; SCIELO.
Host Collectionsid.inpe.br/banon/2003/08.15.17.40
6. Notes
Empty Fieldsalternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype
7. Description control
e-Mail (login)marciana
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