| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16b.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZGivnK2Y/Nop3u |
| Repository | sid.inpe.br/mtc-m17@80/2006/12.07.12.39 (restricted access) |
| Last Update | 2007:06.15.16.59.12 (UTC) administrator |
| Metadata Repository | sid.inpe.br/mtc-m17@80/2006/12.07.12.39.44 |
| Metadata Last Update | 2018:06.05.03.33.56 (UTC) administrator |
| Secondary Key | INPE-14707-PRE/9678 |
| ISSN | 0257-8972 |
| Citation Key | UedaTanDallRoss:2007:SeElSu |
| Title | Secondary electron suppression in nitrogen plasma ion implantation using a low DC magnetic field  |
| Year | 2007 |
| Month | Apr |
| Access Date | 2024, Apr. 28 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 270 KiB |
| 2. Context | |
| Author | 1 Ueda, Mário 2 Tan, Ing Hwie 3 Dallaqua, Renato Sérgio 4 Rossi, José Oswaldo |
| Resume Identifier | 1 2 8JMKD3MGP5W/3C9JHDC |
| Group | 1 LAP-INPE-MCT-BR 2 LAP-INPE-MCT-BR 3 LAP-INPE-MCT-BR 4 LAP-INPE-MCT-BR |
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Instituto Nacional de Pesquisas Espaciais (INPE) |
| Journal | Surface and Coatings Technology |
| Volume | 201 |
| Number | 15 |
| Pages | 6597-6600 |
| History (UTC) | 2007-06-15 16:59:12 :: simone -> administrator :: 2012-11-24 01:39:41 :: administrator -> simone :: 2007 2013-02-20 15:19:55 :: simone -> administrator :: 2007 2018-06-05 03:33:56 :: administrator -> marciana :: 2007 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | Plasma immersion ion implantation Secondary electrons Magnetic suppression |
| Abstract | Experiments aiming at the reduction or even total suppression of secondary electrons during the plasma immersion ion implantation were carried out using a plasma device with low DC magnetic field. Comparison of ion implantations in B = 0 and another case with B = 43 G, indicated that the magnetic field was effective to suppress SE flow in the direction transversal to B but only partial suppression was attained in the longitudinal direction. However, these results are already significant since the efficiency of implantation was increased and the flow of SE to the walls became localized to the regions with B crossing the walls. |
| Area | FISPLASMA |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Secondary electron suppression... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | secondary electron.pdf |
| User Group | administrator simone |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | denypublisher denyfinaldraft24 |
| Read Permission | deny from all and allow from 150.163 |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ET2RFS |
| Dissemination | WEBSCI; PORTALCAPES. |
| Host Collection | lcp.inpe.br/ignes/2004/02.12.18.39 cptec.inpe.br/walmeida/2003/04.25.17.12 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |