| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16b.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZGivnK2Y/SnH9H |
| Repository | sid.inpe.br/mtc-m17@80/2007/12.06.16.38 (restricted access) |
| Last Update | 2008:06.24.17.44.42 (UTC) administrator |
| Metadata Repository | sid.inpe.br/mtc-m17@80/2007/12.06.16.38.43 |
| Metadata Last Update | 2018:06.05.03.30.28 (UTC) administrator |
| Secondary Key | INPE--PRE/ |
| DOI | 10.1016/j.tsf.2007.08.007 |
| ISSN | 0040-6090 |
| Citation Key | CapoteBonSanTraCor:2008:AdAmHy |
| Title | Adherent amorphous hydrogenated carbon films on metals deposited by plasma enhanced chemical vapor deposition  |
| Year | 2008 |
| Month | Apr. |
| Access Date | 2024, Apr. 27 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 621 KiB |
| 2. Context | |
| Author | 1 Capote, Gil 2 Bonetti, L. F. 3 Santos, L. V. 4 Trava-Airoldi, Vladimir Jesus 5 Corat, Evaldo José |
| Group | 1 LAS-CTE-INPE-MCT-BR 2 LAS-CTE-INPE-MCT-BR 3 LAS-CTE-INPE-MCT-BR 4 LAS-CTE-INPE-MCT-BR 5 LAS-CTE-INPE-MCT-BR |
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Instituto Nacional de Pesquisas Espaciais (INPE) 5 Instituto Nacional de Pesquisas Espaciais (INPE) |
| Journal | Thin Solid Films |
| Volume | 516 |
| Number | 12 |
| Pages | 4011-4017 |
| History (UTC) | 2008-06-24 17:44:42 :: simone -> administrator :: 2012-07-13 22:26:26 :: administrator -> simone :: 2013-02-20 15:20:11 :: simone -> administrator :: 2008 2018-06-05 03:30:28 :: administrator -> marciana :: 2008 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | Amorphous hydrogenated carbon Plasma enhanced chemical vapor deposition Silicon interlayer Adhesion X-ray photoelectron spectra Mechanical properties |
| Abstract | This paper reports the findings of a study of the structural, mechanical, and tribological properties of amorphous hydrogenated carbon (a-C:H) coatings for industrial applications. These thin films have proven quite advantageous in many tribological applications, but for others, thicker films are required. In this study, in order to overcome the high residual stress and low adherence of a-C:H films on metal substrates, a thin amorphous silicon interlayer was deposited as an interface. Amorphous silicon and a-C:H films were grown by using a radio frequency plasma enhanced chemical vapor deposition system at 13.56 MHz in silane and methane atmospheres, respectively. The X-ray photoelectron spectroscopy technique was employed to analyze the chemical bonding within the interfaces. The chemical composition and atomic density of the a-C:H films were determined by ion beam analysis. The film microstructure was studied by means of Raman scattering spectroscopy. The total stress was determined through the measurement of the substrate curvature, using a profilometer, while micro-indentation experiments helped determine the films' hardness. The friction coefficient and critical load were evaluated by using a tribometer. The results showed that the use of the amorphous silicon interlayer improved the a-C:H film deposition onto metal substrates, producing good adhesion, low compressive stress, and a high degree of hardness. SiC was observed in the interface between the amorphous silicon and a-C:H films. The composition, the microstructure, the mechanical and tribological properties of the films were strongly dependent on the self-bias voltages. The tests confirmed the importance of the intensity of ion bombardment during film growth on the mechanical and tribological properties of the films. |
| Area | FISMAT |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Adherent amorphous hydrogenated... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | adherent amorphous.pdf |
| User Group | administrator simone |
| Visibility | shown |
| Archiving Policy | denypublisher denyfinaldraft24 |
| Read Permission | deny from all and allow from 150.163 |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 |
| Dissemination | WEBSCI; PORTALCAPES. |
| Host Collection | lcp.inpe.br/ignes/2004/02.12.18.39 cptec.inpe.br/walmeida/2003/04.25.17.12 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel documentstage e-mailaddress electronicmailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup resumeid rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |