| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16c.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 8JMKD3MGP8W/35JL69H |
| Repository | sid.inpe.br/mtc-m18@80/2009/07.02.19.28 (restricted access) |
| Last Update | 2009:07.02.19.28.07 (UTC) administrator |
| Metadata Repository | sid.inpe.br/mtc-m18@80/2009/07.02.19.28.09 |
| Metadata Last Update | 2020:04.28.17.48.43 (UTC) administrator |
| Secondary Key | INPE--PRE/ |
| DOI | 10.1016/j.vacuum.2008.11.013 |
| ISSN | 0042-207X |
| Citation Key | AmorimNaTrCoAlMo:2009:TwGrHF |
| Title | Two-step growth of HFCVD diamond films over large areas  |
| Year | 2009 |
| Month | Mar. |
| Access Date | 2024, Apr. 28 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 212 KiB |
| 2. Context | |
| Author | 1 Amorim, A. 2 Nascente, P. A. P. 3 Trava-Airoldi, Vladimir Jesus 4 Corat, Evaldo José 5 Alves, A. R. 6 Moro, J. R. |
| Group | 1 2 3 LAS-CTE-INPE-MCT-BR 4 LAS-CTE-INPE-MCT-BR |
| Affiliation | 1 2 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Instituto Nacional de Pesquisas Espaciais (INPE) |
| Journal | Vacuum |
| Volume | 89 |
| Number | 7 |
| Pages | 1054-1056 |
| History (UTC) | 2010-03-11 16:27:55 :: simone -> administrator :: 2010-05-11 01:08:47 :: administrator -> banon :: 2010-05-14 14:04:05 :: banon -> administrator :: 2020-04-28 17:48:43 :: administrator -> simone :: 2009 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | HFCVD Diamond Two-step growth Large area |
| Abstract | This paper reports the results of a two-step hot filament chemical vapor deposition method to improve the quality of diamond films. Diamond films were deposited on a Si(100) substrate having an area of 45 cm(2) and a thickness of 60 mu m. employing a HFCVD system. The first step is the growth of CVD diamond in the HFCVD reactor. In the second step, the samples were treated in a saturated solution of H2SO4:CrO3 and rinsed in a (1:1) solution of H2O2: NH4OH. After this procedure, a second diamond layer was deposited. The diamond films were analyzed by raman scattering spectroscopy (RSS). scanning electron microscopy (SEM), and X-ray photoelectron spectroscopy (XPS). The films showed a high degree of purity with a thickness of 60 mu m, presenting uniform characteristics over a large area. |
| Area | FISMAT |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Two-step growth of... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | two step.pdf |
| User Group | administrator banon simone |
| Visibility | shown |
| Archiving Policy | denypublisher denyfinaldraft24 |
| Read Permission | deny from all and allow from 150.163 |
| 5. Allied materials | |
| Mirror Repository | sid.inpe.br/mtc-m18@80/2008/03.17.15.17.24 |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 |
| Dissemination | WEBSCI; PORTALCAPES; COMPENDEX. |
| Host Collection | sid.inpe.br/mtc-m18@80/2008/03.17.15.17 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel documentstage e-mailaddress electronicmailaddress format isbn label lineage mark nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup resumeid rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | simone |
| update | |