| 1. Identity statement | ||||
| Reference Type | Journal Article | |||
| Site | mtc-m16d.sid.inpe.br | |||
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S | |||
| Identifier | 8JMKD3MGP7W/3B25CFL | |||
| Repository | sid.inpe.br/mtc-m19/2011/12.14.11.36 (restricted access) | |||
| Last Update | 2011:12.29.13.49.17 (UTC) administrator | |||
| Metadata Repository | sid.inpe.br/mtc-m19/2011/12.14.11.36.41 | |||
| Metadata Last Update | 2018:06.05.04.25.08 (UTC) administrator | |||
| Secondary Key | INPE--PRE/ | |||
| DOI | 10.1016/j.nimb.2011.04.095 | |||
| ISSN | 0168-583X 0167-5087 | |||
| Citation Key | UedaSiMeSiReOl:2011:InReOx | |||
| Title | Influence of the residual oxygen in the plasma immersion ion implantation (PI3) processing of materials  | |||
| Year | 2011 | |||
| Month | Dec. | |||
| Access Date | 2024, May 04 | |||
| Secondary Type | PRE PI | |||
| Number of Files | 1 | |||
| Size | 776 KiB | |||
| 2. Context | ||||
| Author | 1 Ueda, M. 2 Silva Junior, A. R. 3 Mello, C. B. 4 Silva, G. 5 Reuther, H. 6 Oliveira, V. S. | |||
| Group | 1 LAP-CTE-INPE-MCT-BR 2 LAP-CTE-INPE-MCT-BR 3 LAP-CTE-INPE-MCT-BR 4 LAP-CTE-INPE-MCT-BR 5 6 LAP-CTE-INPE-MCT-BR | |||
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Instituto Nacional de Pesquisas Espaciais (INPE) 5 Institute of Íon Beam Physics and Materials Research, Forschungzentrum Dresden-Rossendorf, Dresden, Germany 6 Instituto Nacional de Pesquisas Espaciais (INPE) | |||
| Journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | |||
| Volume | 269 | |||
| Number | 24 | |||
| Pages | 3246-3250 | |||
| History (UTC) | 2011-12-29 13:49:30 :: marciana -> administrator :: 2011 2012-07-15 03:00:28 :: administrator -> banon :: 2011 2012-09-24 17:25:53 :: banon -> administrator :: 2011 2018-06-05 04:25:08 :: administrator -> marciana :: 2011 | |||
| 3. Content and structure | ||||
| Is the master or a copy? | is the master | |||
| Content Stage | completed | |||
| Transferable | 1 | |||
| Content Type | External Contribution | |||
| Version Type | publisher | |||
| Keywords | Oxide layer Plasma immersion ion implantation Residual oxygen Stainless steel and aluminum alloy | |||
| Abstract | In this work, we investigated the effects of the contaminants present in the vacuum chamber of the PI3 system, in particular, the residual oxygen, which results in the formation of the oxide compounds on the surface and hence is responsible for the high implantation energies required to achieve reasonably thick treated layers. We used a mass spectrometer (RGA) with a quadruple filter to verify the composition of the residual vacuum and pressure of the elements present in the chamber. Initially we found a high proportion of residual oxygen in a vacuum with a pressure of 1 × 10-3 Pa. Minimizing the residual oxygen percentage in about 80%, by efficient cleaning of the chamber walls and by improving the gas feeding process, we mitigated the formation of oxides during the PI3 process. Therefore we achieved a highly efficient PI3 processing obtaining implanted layers reaching about 50 nm, even in cases such as an aluminum alloy, where is very difficult to nitrogen implant at low energies. We performed nitrogen PI3 treatment of SS304 and Al7075 using pulses of only 3 kV and 15 × 10-6 s at 1 kHz with an operating pressure of 1 Pa. | |||
| Area | FISPLASMA | |||
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Influence of the... | |||
| doc Directory Content | access | |||
| source Directory Content | there are no files | |||
| agreement Directory Content |
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| 4. Conditions of access and use | ||||
| Language | en | |||
| User Group | administrator banon marciana | |||
| Visibility | shown | |||
| Archiving Policy | denypublisher denyfinaldraft24 | |||
| Read Permission | deny from all and allow from 150.163 | |||
| Update Permission | not transferred | |||
| 5. Allied materials | ||||
| Mirror Repository | sid.inpe.br/mtc-m19@80/2009/08.21.17.02.53 | |||
| Next Higher Units | 8JMKD3MGPCW/3ET2RFS | |||
| Dissemination | WEBSCI; PORTALCAPES. | |||
| Host Collection | sid.inpe.br/mtc-m19@80/2009/08.21.17.02 | |||
| 6. Notes | ||||
| Empty Fields | alternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel e-mailaddress electronicmailaddress format isbn label lineage mark nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup resumeid rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject targetfile tertiarymark tertiarytype typeofwork url | |||
| 7. Description control | ||||
| e-Mail (login) | marciana | |||
| update | ||||