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1. Identity statement
Reference TypeJournal Article
Sitemtc-m16d.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP7W/36JF7D8
Repositorysid.inpe.br/mtc-m19@80/2009/12.14.18.10   (restricted access)
Last Update2009:12.14.18.10.06 (UTC) administrator
Metadata Repositorysid.inpe.br/mtc-m19@80/2009/12.14.18.10.07
Metadata Last Update2018:06.05.04.36.06 (UTC) administrator
Secondary KeyINPE--PRE/
DOI10.1016/j.tsf.2009.04.037
ISSN0040-6090
Citation KeyMarcianoBoPeMaSaTr:2009:OxPlEt
TitleOxygen plasma etching of silver-incorporated diamond-like carbon films
Year2009
MonthAug.
Access Date2024, Apr. 27
Secondary TypePRE PI
Number of Files1
Size347 KiB
2. Context
Author1 Marciano, Fernanda Roberta
2 Bonetti, L. F.
3 Pessoa, R. S.
4 Massi, M.
5 Santos, Lúcia Vieira
6 Trava-Airoldi, Vladimir Jesus
Group1 LAS-CTE-INPE-MCT-BR
2
3
4
5 LAS-CTE-INPE-MCT-BR
6 LAS-CTE-INPE-MCT-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Clorovale Diamantes Indústria e Comércio Ltda
3 Instituto Tecnológico de Aeronáutica (ITA)
4 Instituto Tecnológico de Aeronáutica (ITA)
5 Instituto Nacional de Pesquisas Espaciais (INPE)
6 Instituto Nacional de Pesquisas Espaciais (INPE)
JournalThin Solid Films
Volume517
Number19
Pages5739-5742
Secondary MarkB2_ASTRONOMIA_/_FÍSICA B2_BIOTECNOLOGIA B1_CIÊNCIAS_BIOLÓGICAS_I B2_CIÊNCIAS_BIOLÓGICAS_II A1_ENGENHARIAS_II A2_ENGENHARIAS_III B1_ENGENHARIAS_IV C_ENSINO_DE_CIÊNCIAS_E_MATEMATICA A1_INTERDISCIPLINAR B1_MATERIAIS B1_MEDICINA_II B2_QUÍMICA
History (UTC)2009-12-14 18:10:48 :: simone -> administrator ::
2018-06-05 04:36:06 :: administrator -> marciana :: 2009
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
KeywordsDiamond-like carbon
Silver nanoparticles
Reactive ion etching
Plasma enhanced chemical vapor deposition
Raman spectroscopy
AbstractDiamond-like carbon (DLC) film as a solid lubricant coating represents an important area of investigation related to space devices. The environment for such devices involves high vacuum and high concentration of atomic oxygen. The purpose of this paper is to study the behavior of silver-incorporated DLC thin films against oxygen plasma etching. Silver nanoparticles were produced through an electrochemical process and incorporated into DLC bulk during the deposition process using plasma enhanced chemical vapor deposition technique. The presence of silver does not affect significantly DLC quality and reduces by more than 50% the oxygen plasma etching. Our results demonstrated that silver nanoparticles protect DLC films against etching process, which may increase their lifetime in low earth orbit environment.
AreaFISMAT
Arrangementurlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Oxygen plasma etching...
doc Directory Contentaccess
source Directory Contentthere are no files
agreement Directory Contentthere are no files
4. Conditions of access and use
Languageen
Target Fileoxygen plasma.pdf
User Groupadministrator
simone
Visibilityshown
Archiving Policydenypublisher denyfinaldraft24
Read Permissiondeny from all and allow from 150.163
5. Allied materials
Mirror Repositorysid.inpe.br/mtc-m19@80/2009/08.21.17.02.53
Next Higher Units8JMKD3MGPCW/3ESR3H2
DisseminationWEBSCI; PORTALCAPES.
Host Collectionsid.inpe.br/mtc-m19@80/2009/08.21.17.02
6. Notes
Empty Fieldsalternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel documentstage e-mailaddress electronicmailaddress format isbn label lineage mark nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup resumeid rightsholder schedulinginformation secondarydate session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype
7. Description control
e-Mail (login)marciana
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